发明申请
- 专利标题: HYBRID INTEGRATED COMPONENT AND METHOD FOR THE MANUFACTURE THEREOF
- 专利标题(中): 混合集成组件及其制造方法
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申请号: US13890450申请日: 2013-05-09
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公开(公告)号: US20130299924A1公开(公告)日: 2013-11-14
- 发明人: Heribert WEBER , Frank Fischer , Mirko Hattass , Yvonne Bergmann
- 申请人: Heribert WEBER , Frank Fischer , Mirko Hattass , Yvonne Bergmann
- 申请人地址: DE Stuttgart
- 专利权人: Robert Bosch GmbH
- 当前专利权人: Robert Bosch GmbH
- 当前专利权人地址: DE Stuttgart
- 优先权: DE102012208033.3 20120514
- 主分类号: B81B3/00
- IPC分类号: B81B3/00 ; B81C1/00
摘要:
A component system includes at least one MEMS element, a cap for a micromechanical structure of the MEMS element, and at least one ASIC substrate. The micromechanical structure of the MEMS element is implemented in the functional layer of an SOI wafer. The MEMS element is mounted face down, with the structured functional layer on the ASIC substrate, and the cap is implemented in the substrate of the SOI wafer. The ASIC substrate includes a starting substrate provided with a layered structure on both sides. At least one circuit level is implemented in each case both in the MEMS-side layered structure and in the rear-side layered structure of the ASIC substrate. In the ASIC substrate, at least one ASIC through contact is implemented which electrically contacts at least one circuit level of the rear-side layered structure and/or at least one circuit level of the MEMS-side layered structure.
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