发明申请
- 专利标题： METHOD FOR DEPOSITING A TRANSPARENT BARRIER LAYER SYSTEM
- 专利标题（中）： 沉积透明阻挡层系统的方法
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申请号： US13980257申请日： 2012-02-15
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公开(公告)号： US20130302536A1公开(公告)日： 2013-11-14
- 发明人: Steffen Guenther , Bjoern Meyer , Steffen Straach , Thomas Kuehnel , Sebastian Bunk , Nicolas Schiller
- 申请人： Steffen Guenther , Bjoern Meyer , Steffen Straach , Thomas Kuehnel , Sebastian Bunk , Nicolas Schiller
- 申请人地址： DE Muenchen
- 专利权人： FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
- 当前专利权人： FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
- 当前专利权人地址： DE Muenchen
- 优先权： DE102011017404.4 20110418
- 国际申请： PCT/EP2012/052537 WO 20120215
- 主分类号： C23C16/30
- IPC分类号： C23C16/30
摘要：
The invention relates to a method for producing a transparent bather layer system, wherein in a vacuum chamber at least two transparent barrier layers and a transparent intermediate layer disposed between the two barrier layers are deposited on a transparent plastic film, wherein for deposition of the barrier layers aluminium is vaporised and simultaneously at least one first reactive gas is introduced into the vacuum chamber and wherein for deposition of the intermediate layer aluminium is vaporised and simultaneously at least one second reactive gas and a gaseous or vaporous organic component are introduced into the vacuum chamber.