公开(公告)号：US20130302536A1

公开(公告)日：2013-11-14

申请号：US13980257

申请日：2012-02-15

申请人： Steffen Guenther ,  Bjoern Meyer ,  Steffen Straach ,  Thomas Kuehnel ,  Sebastian Bunk ,  Nicolas Schiller

发明人： Steffen Guenther ,  Bjoern Meyer ,  Steffen Straach ,  Thomas Kuehnel ,  Sebastian Bunk ,  Nicolas Schiller

IPC分类号： C23C16/30

CPC分类号： C23C16/30 ,  C23C14/0021 ,  C23C14/081 ,  C23C14/562

摘要： The invention relates to a method for producing a transparent bather layer system, wherein in a vacuum chamber at least two transparent barrier layers and a transparent intermediate layer disposed between the two barrier layers are deposited on a transparent plastic film, wherein for deposition of the barrier layers aluminium is vaporised and simultaneously at least one first reactive gas is introduced into the vacuum chamber and wherein for deposition of the intermediate layer aluminium is vaporised and simultaneously at least one second reactive gas and a gaseous or vaporous organic component are introduced into the vacuum chamber.

摘要翻译： 本发明涉及一种制造透明沐浴层系统的方法，其中在真空室中，至少两个透明阻挡层和设置在两个阻挡层之间的透明中间层沉积在透明塑料膜上，其中为了沉积屏障 层铝被蒸发并且同时至少一个第一反应气体被引入到真空室中，并且其中为了沉积中间层铝被蒸发并且同时将至少一个第二反应气体和气态或蒸气有机组分引入真空室 。

公开(公告)号：US20130287969A1

公开(公告)日：2013-10-31

申请号：US13980245

申请日：2012-02-15

申请人： Steffen Guenther ,  Bjoern Meyer ,  Steffen Straach ,  Thomas Kuehnel ,  Sebastian Bunk ,  Nicolas Schiller

发明人： Steffen Guenther ,  Bjoern Meyer ,  Steffen Straach ,  Thomas Kuehnel ,  Sebastian Bunk ,  Nicolas Schiller

IPC分类号： C23C16/18 ,  C23C16/40 ,  C23C16/511 ,  C23C16/34

CPC分类号： C23C16/18 ,  C23C14/0021 ,  C23C14/081 ,  C23C16/34 ,  C23C16/345 ,  C23C16/40 ,  C23C16/401 ,  C23C16/50 ,  C23C16/511 ,  C23C28/42

摘要： The invention relates to a method for producing a transparent barrier layer system, wherein in a vacuum chamber at least two transparent barrier layers and a transparent intermediate layer disposed between the two barrier layers are deposited on a transparent plastic film, wherein for deposition of the barrier layers aluminium is vaporised and simultaneously at least one first reactive gas is introduced into the vacuum chamber and wherein for deposition of the intermediate layer aluminium is vaporised and simultaneously at least one second reactive gas is introduced into the vacuum chamber, and a silicon-containing layer is deposited as intermediate layer by means of a PECVD process.

摘要翻译： 本发明涉及一种透明阻挡层系统的制造方法，其中在真空室中，至少两个透明阻挡层和设置在两个阻挡层之间的透明中间层沉积在透明塑料膜上，其中为了沉积屏障 层铝被蒸发并且同时至少一个第一反应气体被引入真空室中，并且其中为了中间层的沉积，铝被汽化并且同时至少一个第二反应气体被引入到真空室中，并且含硅层 通过PECVD工艺沉积为中间层。