发明申请
- 专利标题: REAL-TIME CALIBRATION FOR WAFER PROCESSING CHAMBER LAMP MODULES
- 专利标题(中): 用于加工室内灯模块的实时校准
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申请号: US13471583申请日: 2012-05-15
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公开(公告)号: US20130306621A1公开(公告)日: 2013-11-21
- 发明人: Chih-Tien Chang , Sunny Wu , Jo Fei Wang , Jong-I Mou , Chin-Hsiang Lin
- 申请人: Chih-Tien Chang , Sunny Wu , Jo Fei Wang , Jong-I Mou , Chin-Hsiang Lin
- 申请人地址: TW Hsin-Chu
- 专利权人: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- 当前专利权人: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- 当前专利权人地址: TW Hsin-Chu
- 主分类号: H05B1/02
- IPC分类号: H05B1/02
摘要:
An apparatus, a system and a method are disclosed. An exemplary apparatus includes a wafer processing chamber. The apparatus further includes radiant heating elements disposed in different zones and operable to heat different portions of a wafer located within the wafer processing chamber. The apparatus further includes sensors disposed outside the wafer processing chamber and operable to monitor energy from the radiant heating elements disposed in the different zones. The apparatus further includes a computer configured to utilize the sensors to characterize the radiant heating elements disposed in the different zones and to provide a calibration for the radiant heating elements disposed in the different zones such that a substantially uniform temperature profile is maintained across a surface of the wafer.
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