发明申请
- 专利标题: HYBRID INTERGRATED COMPONENT
- 专利标题(中): 混合互联组件
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申请号: US13891796申请日: 2013-05-10
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公开(公告)号: US20130307096A1公开(公告)日: 2013-11-21
- 发明人: Johannes CLASSEN , Jens FREY
- 申请人: Johannes CLASSEN , Jens FREY
- 申请人地址: US DE Stuttgart
- 专利权人: ROBERT BOSCH GMBH
- 当前专利权人: ROBERT BOSCH GMBH
- 当前专利权人地址: US DE Stuttgart
- 优先权: DE102012208032.5 20120514
- 主分类号: B81B7/00
- IPC分类号: B81B7/00
摘要:
A hybrid integrated component including an MEMS element and an ASIC element is refined to improve the capacitive signal detection or activation. The MEMS element is implemented in a layered structure on a semiconductor substrate. The layered structure of the MEMS element includes at least one printed conductor level and at least one functional layer, in which the micromechanical structure of the MEMS element having at least one deflectable structural element is implemented. The ASIC element is mounted face down on the layered structure and functions as a cap for the micromechanical structure. The deflectable structural element of the MEMS element is equipped with at least one electrode of a capacitor system. At least one stationary counter electrode of the capacitor system is implemented in the printed conductor level of the MEMS element, and the ASIC element includes at least one further counter electrode of the capacitor system.
公开/授权文献
- US08759927B2 Hybrid intergrated component 公开/授权日:2014-06-24
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