发明申请
- 专利标题: HIGH VOLTAGE FIELD EFFECT TRANSISTORS
- 专利标题(中): 高电压场效应晶体管
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申请号: US13976414申请日: 2011-12-19
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公开(公告)号: US20130307513A1公开(公告)日: 2013-11-21
- 发明人: Han Wui Then , Robert Chau , Benjamin Chu-Kung , Gilbert Dewey , Jack Kavalieros , Matthew Metz , Niloy Mukherjee , Ravi Pillarisetty , Marko Radosavljevic
- 申请人: Han Wui Then , Robert Chau , Benjamin Chu-Kung , Gilbert Dewey , Jack Kavalieros , Matthew Metz , Niloy Mukherjee , Ravi Pillarisetty , Marko Radosavljevic
- 国际申请: PCT/US11/65916 WO 20111219
- 主分类号: H01L29/775
- IPC分类号: H01L29/775 ; G05F3/02 ; H01L29/66
摘要:
Transistors suitable for high voltage and high frequency operation. A nanowire is disposed vertically or horizontally on a substrate. A longitudinal length of the nanowire is defined into a channel region of a first semiconductor material, a source region electrically coupled with a first end of the channel region, a drain region electrically coupled with a second end of the channel region, and an extrinsic drain region disposed between the channel region and drain region. The extrinsic drain region has a wider bandgap than that of the first semiconductor. A gate stack including a gate conductor and a gate insulator coaxially wraps completely around the channel region, drain and source contacts similarly coaxially wrap completely around the drain and source regions.
公开/授权文献
- US09245989B2 High voltage field effect transistors 公开/授权日:2016-01-26
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