Invention Application
- Patent Title: CAPACITIVE ELECTROMECHANICAL TRANSDUCER
- Patent Title (中): 电容式电磁传感器
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Application No.: US13983287Application Date: 2012-01-16
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Publication No.: US20130313663A1Publication Date: 2013-11-28
- Inventor: Ayako Kato , Kazutoshi Torashima , Yasuhiro Soeda , Shinichiro Watanabe
- Applicant: Ayako Kato , Kazutoshi Torashima , Yasuhiro Soeda , Shinichiro Watanabe
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Priority: JP2011-027965 20110211
- International Application: PCT/JP2012/051281 WO 20120116
- Main IPC: H01L29/84
- IPC: H01L29/84

Abstract:
Provided is a capacitive electromechanical transducer manufactured by fusion bonding, which is capable of enhancing the performance by reducing fluctuations in initial deformation among diaphragms caused at positions having difference boundary conditions such as the bonding area. The capacitive electromechanical transducer includes a device, the device including at least one cellular structure including: a silicon substrate; a diaphragm; and a diaphragm supporting portion configured to support the diaphragm so that a gap is formed between one surface of the silicon substrate and the diaphragm. The device has, in its periphery, a groove formed in a layer shared with the diaphragm supporting portion.
Information query
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