摘要:
An oscillator device includes a first oscillator, a second oscillator configured to support the first oscillator for torsional rotation about a first rotational axis, through a first torsion spring, a supporting member configured to support the second oscillator for torsional rotation about a second rotational axis, through a second torsion spring, the second rotational axis having a predetermined angle with respect to the first rotational axis of the first oscillator, a coil disposed in relation to the second oscillator, an electric current applying member configured to apply an electric current to the coil, and a magnetic field generating member configured to apply a magnetic field to the coil, wherein the coil is localized in at least one of zones of the second oscillator being quartered by extension lines of the first and second rotational axes.
摘要:
A motor apparatus has a motor which is rotatable by electromagnetic force, a load mounted to an output shaft of the motor, and an angular detecting unit for detecting a rotational angle of the output shaft of the motor or the load. In the motor apparatus, the angular detecting unit has a magnetic sensor and a magnet, and one of the magnetic sensor and the magnet is fixed to the output shaft of the motor or to the rotational axis portion of the load on a side opposite to a side of the motor with the load interposed therebetween.
摘要:
A process for producing a capacitive electromechanical conversion device by bonding together a substrate and a membrane member to form a cavity sealed between the substrate and the membrane member, the process for producing a capacitive electromechanical conversion device comprises the steps of: providing a gas release path penetrating from a bonded interface between the substrate and the membrane member to the outside, and forming the cavity by bonding the membrane member with the substrate with the gas release path provided; the gas release path being provided at a location where the path does not communicate with the cavity.
摘要:
An element array comprises a plurality of elements having a first electrode and a second electrode with a gap therebetween; the first electrode is separated for each of the elements by grooves, an insulating connection substrate is bonded to the first electrode, and wirings are provided from the respective first electrodes through the connection substrate to the side opposite to the first electrodes.
摘要:
A capacitive electro-mechanical transducer includes a plurality of cavities, a communicating portion for connecting the cavities to each other, and two electrodes sandwiching each of the cavities. The cavities are sealed from outside, and at least a portion of the communicating portion is closed to interrupt the communication between the cavities through the communicating portion.
摘要:
A process for producing a capacitive electromechanical conversion device by bonding together a substrate and a membrane member to form a cavity sealed between the substrate and the membrane member, the process for producing a capacitive electromechanical conversion device comprises the steps of: providing a gas release path penetrating from a bonded interface between the substrate and the membrane member to the outside, and forming the cavity by bonding the membrane member with the substrate with the gas release path provided; the gas release path being provided at a location where the path does not communicate with the cavity.
摘要:
A capacitive electro-mechanical transducer includes a plurality of cavities, a communicating portion for connecting the cavities to each other, and two electrodes sandwiching each of the cavities. The cavities are sealed from outside, and at least a portion of the communicating portion is closed to interrupt the communication between the cavities through the communicating portion.
摘要:
An image displaying apparatus displaying a color image with favorable quality on a predetermined surface comprises; light source unit for emitting light beams within different wavelength ranges optically modulated by image information; light combining unit for combining light beams from the light source unit into a light beam; scanning unit for scanning a scanned surface with the light beam from the light combining unit and forming image thereon; and controlling unit for synchronously controlling the scanning unit and the light source unit, wherein dividing unit for dividing a light beam into light beams is provided within an arbitrary optical path on light-incident side of the scanning unit; receiving unit and adjustment unit for adjusting quantity of light emission of one or more light source unit based on the light quantity received by the receiving unit are provided on one of the optical paths divided by the dividing unit.
摘要:
Provided is a method of manufacturing a capacitive electromechanical transducer using fusion bonding, which is capable of reducing fluctuations in initial deformation among diaphragms caused at positions having different boundary conditions such as the bonding area, thereby enhancing the uniformity of the transducer and stabilizing the sensitivity and the like. The method of manufacturing a capacitive electromechanical transducer includes: forming an insulating layer on a first silicon substrate and forming at least one recess; fusion bonding a second silicon substrate onto the insulating layer; and thinning the second silicon substrate and forming a silicon film. The method further includes, before the bonding of the second silicon substrate onto the insulating layer, forming a groove in the insulating layer at the periphery of the at least one recess.
摘要:
An element array comprises a plurality of elements having a first electrode and a second electrode with a gap therebetween; the first electrode being separated for each of the elements by grooves, an insulating connection substrate being bonded to the first electrode, and a wiring being made from each of the respective first electrodes separated for each of the elements through the connection substrate to the side opposite to the first electrodes.