发明申请
- 专利标题： MULTIPOLE AND CHARGED PARTICLE RADIATION APPARATUS USING THE SAME
- 专利标题（中）： 多功能和充电粒子辐射装置使用它
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申请号： US14000236申请日： 2012-02-29
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公开(公告)号： US20130320227A1公开(公告)日： 2013-12-05
- 发明人: Kotoko Urano , Takeshi Kawasaki , Noboru Moriya , Tomonori Nakano
- 申请人： Kotoko Urano , Takeshi Kawasaki , Noboru Moriya , Tomonori Nakano
- 申请人地址： JP Tokyo
- 专利权人： HITACHI HIGH-TECHNOLOGIES CORPORATION
- 当前专利权人： HITACHI HIGH-TECHNOLOGIES CORPORATION
- 当前专利权人地址： JP Tokyo
- 优先权： JP2011-073877 20110330
- 国际申请： PCT/JP2012/001360 WO 20120229
- 主分类号： H01J37/153
- IPC分类号： H01J37/153
摘要：
In order to realize a multiple assembled easily with high accuracy, a multipole having assembly accuracy within 10 micrometer and within several seconds of angle is achieved by fixing multipole elements by being guided by grooves provided on an inner side of a cylindrical housing to form the multipole.
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