发明申请
- 专利标题: BATCH PROCESS FOR THREE-DIMENSIONAL INTEGRATION
- 专利标题(中): 三维整合的批处理过程
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申请号: US13489401申请日: 2012-06-05
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公开(公告)号: US20130320567A1公开(公告)日: 2013-12-05
- 发明人: Hiren D. Thacker , Ashok V. Krishnamoorthy , John E. Cunningham
- 申请人: Hiren D. Thacker , Ashok V. Krishnamoorthy , John E. Cunningham
- 申请人地址: US CA Redwood Shores
- 专利权人: ORACLE INTERNATIONAL CORPORATION
- 当前专利权人: ORACLE INTERNATIONAL CORPORATION
- 当前专利权人地址: US CA Redwood Shores
- 主分类号: H01L23/488
- IPC分类号: H01L23/488 ; H01L21/78
摘要:
A chip package is described which includes a first chip having a first surface and first sides having a first side-wall angle, and a second chip having a second surface and second sides having a second side-wall angle, which faces and is mechanically coupled to the first chip. The chip package is fabricated using a batch process, and the chips in the chip package were singulated from their respective wafers after the chip package is assembled. This is accomplished by etching the first and second side-wall angles and thinning the wafer thicknesses prior to assembling the chip package. For example, the first and/or the second side walls can be fabricated using wet etching or dry etching. Therefore, the first and/or the second side-wall angles may be other than vertical or approximately vertical.
公开/授权文献
- US09082808B2 Batch process for three-dimensional integration 公开/授权日:2015-07-14
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