发明申请
US20130340671A1 SILICA GLASS CRUCIBLE, METHOD FOR MANUFACTURING SAME, AND METHOD FOR MANUFACTURING SILICON SINGLE CRYSTAL
审中-公开
二氧化硅玻璃巧克力,其制造方法和制造硅单晶的方法
- 专利标题: SILICA GLASS CRUCIBLE, METHOD FOR MANUFACTURING SAME, AND METHOD FOR MANUFACTURING SILICON SINGLE CRYSTAL
- 专利标题(中): 二氧化硅玻璃巧克力,其制造方法和制造硅单晶的方法
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申请号: US14003348申请日: 2012-02-15
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公开(公告)号: US20130340671A1公开(公告)日: 2013-12-26
- 发明人: Akihiro Kimura , Ryoji Hoshi , Nobuaki Mitamura , Hiroyuki Kamada
- 申请人: Akihiro Kimura , Ryoji Hoshi , Nobuaki Mitamura , Hiroyuki Kamada
- 申请人地址: JP Tokyo
- 专利权人: SHIN-ETSU HANDOTAI CO., LTD.
- 当前专利权人: SHIN-ETSU HANDOTAI CO., LTD.
- 当前专利权人地址: JP Tokyo
- 优先权: JP2011-087083 20110411
- 国际申请: PCT/JP2012/000975 WO 20120215
- 主分类号: C30B15/10
- IPC分类号: C30B15/10 ; C03B20/00
摘要:
A method for manufacturing a silica glass crucible, includes: preparing a crucible base material that is made of silica glass and has a crucible shape; fabricating a synthetic silica glass material based on a direct method or a soot method; processing the synthetic silica glass material into the crucible shape without being pulverized; and bonding an inner wall of the crucible base material and an outer wall of the synthetic silica glass material processed into the crucible shape through a silica powder by performing a heat treatment. As a result, it is possible to provide the silica glass crucible that can avoid occurrence of dislocations of silicon single crystal at the time of manufacturing the silicon single crystal, has high heat-resisting properties, and can suppress a reduction in productivity and yield ratio, the manufacturing method thereof, and the method for manufacturing silicon single crystal using such a silica glass crucible.
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