发明申请
- 专利标题: Polycrystalline Silicon Wafer
- 专利标题(中): 多晶硅片
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申请号: US14003388申请日: 2012-03-08
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公开(公告)号: US20130341622A1公开(公告)日: 2013-12-26
- 发明人: Hiroshi Takamura , Ryo Suzuki
- 申请人: Hiroshi Takamura , Ryo Suzuki
- 申请人地址: JP Tokyo
- 专利权人: JX NIPPON MINING & METALS CORPORATION
- 当前专利权人: JX NIPPON MINING & METALS CORPORATION
- 当前专利权人地址: JP Tokyo
- 优先权: JP2011-056503 20110315
- 国际申请: PCT/JP2012/055952 WO 20120308
- 主分类号: H01L29/04
- IPC分类号: H01L29/04
摘要:
Provided is a polycrystalline silicon wafer produced by a melting and unidirectional solidification method, where the polycrystalline silicon wafer has a diameter of 450 mm or more, a thickness of 900 μm or more, and an average crystal grain size of 5 to 50 mm, and is made up of one piece. The present invention provides a large-sized polycrystalline silicon wafer having a wafer size of 450 mm or more, of which: mechanical properties are similar to those of monocrystalline silicon wafers; the crystal size is large; the surface roughness is low; the surface has a high cleanliness; the polished surface has less unevenness by having a definite crystal orientation; and the sag value is similar to that of monocrystalline silicon wafers.
公开/授权文献
- US08987737B2 Polycrystalline silicon wafer 公开/授权日:2015-03-24
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