发明申请
- 专利标题: METHOD FOR RESUMING OPERATION OF WIRE SAW AND WIRE SAW
- 专利标题(中): 用于重复电线和线路操作的方法
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申请号: US14004791申请日: 2012-04-02
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公开(公告)号: US20140000580A1公开(公告)日: 2014-01-02
- 发明人: Koji Kitagawa
- 申请人: Koji Kitagawa
- 申请人地址: JP Tokyo
- 专利权人: SHIN-ETSU HANDOTAI CO., LTD.
- 当前专利权人: SHIN-ETSU HANDOTAI CO., LTD.
- 当前专利权人地址: JP Tokyo
- 优先权: JP2011-094357 20110420
- 国际申请: PCT/JP2012/002276 WO 20120402
- 主分类号: B28D5/04
- IPC分类号: B28D5/04
摘要:
The present invention provides a method of resuming operation of a wire saw in which slicing of a workpiece is suspended and then resumed, including slicing the workpiece while detecting a traveling direction and a traveling speed of the reciprocating wire and recording them chronologically; and resuming the slicing while controlling the traveling direction and a traveling time in the traveling direction of the wire on a basis of a wire traveling history recorded until the suspending of the slicing of the workpiece such that the reciprocating cycle of the wire becomes continuous between before the suspending and after the resuming of the slicing of the workpiece. This method enables the slicing to be completed while the nanotopography of the sliced wafer is surely prevented from degrading, even when the slicing of the workpiece with a wire saw is suspended due to, for example, breaking of the wire.
公开/授权文献
- US09079332B2 Method for resuming operation of wire saw and wire saw 公开/授权日:2015-07-14
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