Invention Application
- Patent Title: ELECTRONIC DEVICE AND METHOD OF MANUFACTURING THE SAME
- Patent Title (中): 电子设备及其制造方法
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Application No.: US14022604Application Date: 2013-09-10
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Publication No.: US20140009035A1Publication Date: 2014-01-09
- Inventor: Osamu TOYODA
- Applicant: FUJITSU LIMITED
- Applicant Address: JP Kawasaki-shi
- Assignee: FUJITSU LIMITED
- Current Assignee: FUJITSU LIMITED
- Current Assignee Address: JP Kawasaki-shi
- Main IPC: F03G7/06
- IPC: F03G7/06 ; H01L41/09 ; H02N1/00 ; C25D7/00
Abstract:
An electronic device includes a substrate, an electrode formed on the substrate, and a movable portion provided above the electrode, the movable portion being elastically deformable, in which the movable potion includes a shape memory alloy film.
Public/Granted literature
- US09488162B2 Electronic device Public/Granted day:2016-11-08
Information query
