发明申请
- 专利标题： DEPOSITION SYSTEM WITH ELECTRICALLY ISOLATED PALLET AND ANODE ASSEMBLIES
- 专利标题（中）： 具有电隔离托盘和阳极组件的沉积系统
-
申请号： US14023211申请日： 2013-09-10
-
公开(公告)号： US20140014499A1公开(公告)日： 2014-01-16
- 发明人: Peter John Cousins , Hsin-Chiao Luan , Thomas Pass , John Ferrer , Rex Gallardo , Stephen F. Meyer
- 申请人： Peter John Cousins , Hsin-Chiao Luan , Thomas Pass , John Ferrer , Rex Gallardo , Stephen F. Meyer
- 主分类号： C23C14/34
- IPC分类号： C23C14/34
摘要：
A system for substrate deposition is disclosed. The system includes a wafer pallet and an anode. The wafer pallet has a bottom and a top. The top of the wafer pallet is configured to hold a substrate wafer. The anode has a substantially fixed position relative to the wafer pallet and is configured to move with the wafer pallet through the deposition chamber. The anode is electrically isolated from the substrate wafer.
公开/授权文献
信息查询
IPC分类:
