The present invention aims at providing a pattern matching device that conducts pattern matching on an image including a plurality of regions having different features with high precision, such as a pattern image including a plurality of layers.In order to achieve the above object, the present invention proposes a pattern matching device that executes pattern matching on a target image with the use of a template formed on the basis of design data or a picked-up image, which executes the pattern matching on a first target image with the use of a first template including a plurality of different patterns, creates a second target image with the exclusion of information on a region including a specific pattern from the first target image, and determines the degree of similarity between the second target image, and a second template including pattern information other than the specific pattern.