发明申请
US20140017820A1 Co/Ni Multilayers with Improved Out-of-Plane Anisotropy for Magnetic Device Applications 有权
具有改进的磁性器件应用的平面各向异性的Co / Ni多层

Co/Ni Multilayers with Improved Out-of-Plane Anisotropy for Magnetic Device Applications
摘要:
A method for forming a MTJ in a spintronic device is disclosed and includes a thin seed layer that enhances perpendicular magnetic anisotropy (PMA) in an overlying laminated layer with a (Co/Ni)n composition. The seed layer is preferably NiCr, NiFeCr, Hf, or a composite thereof. Furthermore, a magnetic layer such as CoFeB may be formed between the laminated layer and a tunnel barrier layer to serve as a transitional layer between a (111) laminate and (100) MgO tunnel barrier. There may be a Ta insertion layer between the CoFeB layer and laminated layer to promote (100) crystallization in the CoFeB layer. The laminated layer may be used as a reference layer, dipole layer, or free layer in a MTJ. Annealing between 300° C. and 400° C. may be used to further enhance PMA in the laminated layer.
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