发明申请
US20140017820A1 Co/Ni Multilayers with Improved Out-of-Plane Anisotropy for Magnetic Device Applications
有权
具有改进的磁性器件应用的平面各向异性的Co / Ni多层
- 专利标题: Co/Ni Multilayers with Improved Out-of-Plane Anisotropy for Magnetic Device Applications
- 专利标题(中): 具有改进的磁性器件应用的平面各向异性的Co / Ni多层
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申请号: US14032599申请日: 2013-09-20
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公开(公告)号: US20140017820A1公开(公告)日: 2014-01-16
- 发明人: Guenole Jan , Witold Kula , Ru Ying Tong , Yu Jen Wang
- 申请人: Guenole Jan , Witold Kula , Ru Ying Tong , Yu Jen Wang
- 申请人地址: US CA Milpitas
- 专利权人: MAGIC TECHNOLOGIES, INC.
- 当前专利权人: MAGIC TECHNOLOGIES, INC.
- 当前专利权人地址: US CA Milpitas
- 主分类号: H01L43/12
- IPC分类号: H01L43/12
摘要:
A method for forming a MTJ in a spintronic device is disclosed and includes a thin seed layer that enhances perpendicular magnetic anisotropy (PMA) in an overlying laminated layer with a (Co/Ni)n composition. The seed layer is preferably NiCr, NiFeCr, Hf, or a composite thereof. Furthermore, a magnetic layer such as CoFeB may be formed between the laminated layer and a tunnel barrier layer to serve as a transitional layer between a (111) laminate and (100) MgO tunnel barrier. There may be a Ta insertion layer between the CoFeB layer and laminated layer to promote (100) crystallization in the CoFeB layer. The laminated layer may be used as a reference layer, dipole layer, or free layer in a MTJ. Annealing between 300° C. and 400° C. may be used to further enhance PMA in the laminated layer.
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