发明申请
- 专利标题: SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SAME
- 专利标题(中): 半导体器件及其制造方法
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申请号: US14009628申请日: 2012-03-29
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公开(公告)号: US20140021489A1公开(公告)日: 2014-01-23
- 发明人: Kenji Hamada , Tsuyoshi Kawakami
- 申请人: Kenji Hamada , Tsuyoshi Kawakami
- 申请人地址: JP Tokyo
- 专利权人: Mitsubishi Electric Corporation
- 当前专利权人: Mitsubishi Electric Corporation
- 当前专利权人地址: JP Tokyo
- 优先权: JP2011-082386 20110404
- 国际申请: PCT/JP2012/058375 WO 20120329
- 主分类号: H01L29/16
- IPC分类号: H01L29/16
摘要:
A semiconductor device having a high withstand voltage in which a stable withstand voltage can be obtained and a method for manufacturing the same. A JTE region having a second conductivity type is formed in a portion on an outer peripheral end side of an SiC substrate from a second conductivity type SiC region in a vicinal portion of a surface on one of sides in a thickness direction of a first conductivity type SiC epitaxial layer. A first conductivity type SiC region having a higher concentration of an impurity having the first conductivity type than that of the SiC epitaxial layer is formed in at least a vicinal portion of a surface on one of sides in a thickness direction of a portion in which the JTE regions are bonded to each other.
公开/授权文献
- US08866158B2 Semiconductor device and method for manufacturing same 公开/授权日:2014-10-21
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