发明申请
- 专利标题: HIGH MOBILITY STRAINED CHANNELS FOR FIN-BASED TRANSISTORS
- 专利标题(中): 用于基于晶体的晶体管的高移动性应变通道
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申请号: US13560474申请日: 2012-07-27
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公开(公告)号: US20140027816A1公开(公告)日: 2014-01-30
- 发明人: Stephen M. Cea , Anand S. Murthy , Glenn A. Glass , Daniel B. Aubertine , Tahir Ghani , Jack T. Kavalieros , Roza Kotlyar
- 申请人: Stephen M. Cea , Anand S. Murthy , Glenn A. Glass , Daniel B. Aubertine , Tahir Ghani , Jack T. Kavalieros , Roza Kotlyar
- 主分类号: H01L29/78
- IPC分类号: H01L29/78 ; H01L29/165
摘要:
Techniques are disclosed for incorporating high mobility strained channels into fin-based transistors (e.g., FinFETs such as double-gate, trigate, etc), wherein a stress material is cladded onto the channel area of the fin. In one example embodiment, silicon germanium (SiGe) is cladded onto silicon fins to provide a desired stress, although other fin and cladding materials can be used. The techniques are compatible with typical process flows, and the cladding deposition can occur at a plurality of locations within the process flow. In some cases, the built-in stress from the cladding layer may be enhanced with a source/drain stressor that compresses both the fin and cladding layers in the channel. In some cases, an optional capping layer can be provided to improve the gate dielectric/semiconductor interface. In one such embodiment, silicon is provided over a SiGe cladding layer to improve the gate dielectric/semiconductor interface.
公开/授权文献
- US08847281B2 High mobility strained channels for fin-based transistors 公开/授权日:2014-09-30
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