发明申请
US20140032463A1 ACCURATE AND FAST NEURAL NETWORK TRAINING FOR LIBRARY-BASED CRITICAL DIMENSION (CD) METROLOGY
有权
基于图书馆临界尺度（CD）的精确和快速的神经网络训练
- 专利标题： ACCURATE AND FAST NEURAL NETWORK TRAINING FOR LIBRARY-BASED CRITICAL DIMENSION (CD) METROLOGY
- 专利标题（中）： 基于图书馆临界尺度（CD）的精确和快速的神经网络训练
-
申请号： US14044729申请日： 2013-10-02
-
公开(公告)号： US20140032463A1公开(公告)日： 2014-01-30
- 发明人: Wen Jin , Vi Vuong , Junwei Bao , Lie-Quan Lee , Leonid Poslavsky
- 申请人： Wen Jin , Vi Vuong , Junwei Bao , Lie-Quan Lee , Leonid Poslavsky
- 主分类号： G06N3/08
- IPC分类号： G06N3/08
摘要：
Approaches for accurate neural network training for library-based critical dimension (CD) metrology are described. Approaches for fast neural network training for library-based CD metrology are also described.
公开/授权文献
信息查询
