Invention Application
US20140034952A1 Liquid Crystal Display Device, Array Substrate and Manufacturing Method Thereof
审中-公开
液晶显示装置，阵列基板及其制造方法
- Patent Title: Liquid Crystal Display Device, Array Substrate and Manufacturing Method Thereof
- Patent Title (中): 液晶显示装置，阵列基板及其制造方法
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Application No.: US13582746Application Date: 2012-08-03
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Publication No.: US20140034952A1Publication Date: 2014-02-06
- Inventor: Cheng-hung Chen
- Applicant: Cheng-hung Chen
- Applicant Address: CN Shenzhen
- Assignee: SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO. LTD.
- Current Assignee: SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO. LTD.
- Current Assignee Address: CN Shenzhen
- Priority: CN201210269093.9 20120731
- International Application: PCT/CN12/79670 WO 20120803
- Main IPC: H01L29/786
- IPC: H01L29/786 ; H01L33/08
Abstract:
The present invention provides a manufacturing method for array substrate, including: forming a first conductive layer, a first isolator layer, a second conductive layer and a second isolator layer on a substrate from bottom up, the first conductive layer for forming electrically connected scan line and control terminal of switch transistor, performing dry etch on the second isolator layer to form via hole, and forming a third conductive layer on the second isolator layer for forming data line. The present invention also provides an arrays substrate and a liquid crystal display device. As such, the present invention can reduce the possibility of electrostatic explosion during array substrate manufacturing process and improve the yield rate of array substrate.
Information query
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