发明申请
US20140034952A1 Liquid Crystal Display Device, Array Substrate and Manufacturing Method Thereof
审中-公开
液晶显示装置，阵列基板及其制造方法
- 专利标题： Liquid Crystal Display Device, Array Substrate and Manufacturing Method Thereof
- 专利标题（中）： 液晶显示装置，阵列基板及其制造方法
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申请号： US13582746申请日： 2012-08-03
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公开(公告)号： US20140034952A1公开(公告)日： 2014-02-06
- 发明人: Cheng-hung Chen
- 申请人： Cheng-hung Chen
- 申请人地址： CN Shenzhen
- 专利权人： SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO. LTD.
- 当前专利权人： SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO. LTD.
- 当前专利权人地址： CN Shenzhen
- 优先权： CN201210269093.9 20120731
- 国际申请： PCT/CN12/79670 WO 20120803
- 主分类号： H01L29/786
- IPC分类号： H01L29/786 ; H01L33/08
摘要：
The present invention provides a manufacturing method for array substrate, including: forming a first conductive layer, a first isolator layer, a second conductive layer and a second isolator layer on a substrate from bottom up, the first conductive layer for forming electrically connected scan line and control terminal of switch transistor, performing dry etch on the second isolator layer to form via hole, and forming a third conductive layer on the second isolator layer for forming data line. The present invention also provides an arrays substrate and a liquid crystal display device. As such, the present invention can reduce the possibility of electrostatic explosion during array substrate manufacturing process and improve the yield rate of array substrate.
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