发明申请
- 专利标题: GRADED DUMMY INSERTION
- 专利标题(中): 分级DUMMY插入
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申请号: US13562638申请日: 2012-07-31
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公开(公告)号: US20140040836A1公开(公告)日: 2014-02-06
- 发明人: Wen-Shen Chou , Yung-Chow Peng , Chih-Chiang Chang , Chin-Hua Wen
- 申请人: Wen-Shen Chou , Yung-Chow Peng , Chih-Chiang Chang , Chin-Hua Wen
- 申请人地址: TW Hsin-Chu
- 专利权人: Taiwan Semiconductor Manufacturing Company Limited
- 当前专利权人: Taiwan Semiconductor Manufacturing Company Limited
- 当前专利权人地址: TW Hsin-Chu
- 主分类号: G06F17/50
- IPC分类号: G06F17/50
摘要:
Among other things, one or more techniques for graded dummy insertion and a resulting array are provided herein. For example an array is a metal oxide semiconductor (MOS) array, a metal oxide metal (MOM) array, or a resistor array. In some embodiments, a first region and a second region are identified based on a density gradient between a first pattern density associated with the first region and a second pattern density associated with the second region. For example, the first pattern density and the second pattern density are gate densities and/or poly densities. To this end, a dummy region is inserted between the first region and the second region, the dummy region includes a graded pattern density based on a first adjacent pattern density and a second adjacent pattern density. In this manner, graded dummy insertion is provided, thus enhancing edge cell performance for an array, for example.
公开/授权文献
- US08719755B2 Graded dummy insertion 公开/授权日:2014-05-06
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