Invention Application
US20140048897A1 PIXEL WITH NEGATIVELY-CHARGED SHALLOW TRENCH ISOLATION (STI) LINER
审中-公开
PIXEL带负电荷的浅层隔离（STI）衬垫
- Patent Title: PIXEL WITH NEGATIVELY-CHARGED SHALLOW TRENCH ISOLATION (STI) LINER
- Patent Title (中): PIXEL带负电荷的浅层隔离（STI）衬垫
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Application No.: US13587811Application Date: 2012-08-16
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Publication No.: US20140048897A1Publication Date: 2014-02-20
- Inventor: Yin Qian , Hsin-Chih Tai , Gang Chen , Duli Mao , Vincent Venezia , Howard E. Rhodes
- Applicant: Yin Qian , Hsin-Chih Tai , Gang Chen , Duli Mao , Vincent Venezia , Howard E. Rhodes
- Applicant Address: US CA Santa Clara
- Assignee: OMNIVISION TECHNOLOGIES, INC.
- Current Assignee: OMNIVISION TECHNOLOGIES, INC.
- Current Assignee Address: US CA Santa Clara
- Main IPC: H01L31/02
- IPC: H01L31/02 ; H01L31/18
Abstract:
Embodiments of a pixel including a substrate having a front surface and a photosensitive region formed in or near the front surface of the substrate. An isolation trench is formed in the front surface of the substrate adjacent to the photosensitive region. The isolation trench includes a trench having a bottom and sidewalls, a passivation layer formed on the bottom and the sidewalls, and a filler to fill the portion of the trench not filled by the passivation layer.
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