发明申请
- 专利标题: VERTICAL TYPE SEMICONDUCTOR DEVICES AND METHODS OF MANUFACTURING THE SAME
- 专利标题(中): 垂直型半导体器件及其制造方法
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申请号: US13945336申请日: 2013-07-18
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公开(公告)号: US20140054675A1公开(公告)日: 2014-02-27
- 发明人: Sung-Hae LEE , Toshiro NAKANISHI , Dong-Woo KIM , Chae-Ho KIM
- 申请人: Chae-Ho Kim , Sung-Hae Lee , Toshiro Nakanishi , Dong-Woo Kim
- 优先权: KR10-2012-0092170 20120823
- 主分类号: H01L29/792
- IPC分类号: H01L29/792 ; H01L29/66
摘要:
According to example embodiments, a vertical type semiconductor device includes a pillar structure on a substrate. The pillar structure includes a semiconductor pattern and a channel pattern. The semiconductor pattern includes an impurity region. A first word line structure faces the channel pattern and is horizontally extended while surrounding the pillar structure. A second word line structure has one side facing the impurity region of the semiconductor pattern and another side facing the substrate. A common source line is provided at a substrate portion adjacent to a sidewall end portion of the second word line structure.
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