发明申请
US20140057412A1 METHOD FOR FUSING A LASER FUSE AND METHOD FOR PROCESSING A WAFER
有权
用于熔化激光熔丝的方法和用于处理波形的方法
- 专利标题： METHOD FOR FUSING A LASER FUSE AND METHOD FOR PROCESSING A WAFER
- 专利标题（中）： 用于熔化激光熔丝的方法和用于处理波形的方法
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申请号： US13594946申请日： 2012-08-27
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公开(公告)号： US20140057412A1公开(公告)日： 2014-02-27
- 发明人: Gunther Mackh , Gerhard Leschik
- 申请人： Gunther Mackh , Gerhard Leschik
- 申请人地址： DE Neubiberg
- 专利权人： INFINEON TECHNOLOGIES AG
- 当前专利权人： INFINEON TECHNOLOGIES AG
- 当前专利权人地址： DE Neubiberg
- 主分类号： H01L21/268
- IPC分类号： H01L21/268 ; H01L21/78
摘要：
A method for fusing a laser fuse in accordance with various embodiments may include: providing a semiconductor workpiece having a substrate region and at least one laser fuse; fusing the at least one laser fuse from a back side of the substrate region by means of an infrared laser beam.