发明申请
- 专利标题: SEMICONDUCTOR MEMORY DEVICE
- 专利标题(中): 半导体存储器件
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申请号: US13728311申请日: 2012-12-27
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公开(公告)号: US20140061773A1公开(公告)日: 2014-03-06
- 发明人: Masaaki HIGUCHI , Masaru Kito
- 申请人: Masaaki HIGUCHI , Masaru Kito
- 主分类号: H01L29/792
- IPC分类号: H01L29/792
摘要:
According to one embodiment, a semiconductor memory device includes a substrate, a stacked body, a plurality of insulative separating films, a channel body, and a memory film. The stacked body includes a plurality of electrode layers and a plurality of insulating layers. The plurality of insulative separating films separates the stacked body into a plurality. The channel body extends in the stacking direction between the plurality of insulative separating films. A width of the electrode layer of a lower layer side between the insulative separating film and the memory film is greater than a width of the electrode layer of an upper layer side between the insulative separating film and the memory film. An electrical resistivity of the electrode layer is higher for the electrode layer of the lower layer side having the greater width than for the electrode layer of the upper layer side having the lesser width.
公开/授权文献
- US08754459B2 Semiconductor memory device 公开/授权日:2014-06-17
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