发明申请
US20140071422A1 DUAL WAFER STAGE SWITCHING SYSTEM FOR A LITHOGRAPHY MACHINE 有权
用于雕刻机的双波段切换系统

DUAL WAFER STAGE SWITCHING SYSTEM FOR A LITHOGRAPHY MACHINE
摘要:
Disclosed is a dual wafer stage switching system for a lithography machine. The system comprises a base stage (30), a wafer stage (16.1) running at a pre-processing workstation, and a wafer stage (16.2) running at an exposure workstation. A rotating motor (41) is mounted under the base stage (30) for rotating the two wafer stages after the wafer stages have completed pre-processing and exposure operations in order to complete position switch of the wafer stages, wherein the base stage (30) is kept stationary during the switch. The present invention avoids rotation of a large inertia base stage and has low requirement for motor power, while eliminating a guide rail docking device and an auxiliary device and greatly simplifying system configuration. The system is easy and convenient to operate and easy to control.
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