公开(公告)号：US09030648B2

公开(公告)日：2015-05-12

申请号：US13262802

申请日：2010-04-02

申请人： Yu Zhu ,  Ming Zhang ,  Jingsong Wang ,  Li Tian ,  Dengfeng Xu ,  Wensheng Yin ,  Guanghong Duan ,  Jinchun Hu

发明人： Yu Zhu ,  Ming Zhang ,  Jingsong Wang ,  Li Tian ,  Dengfeng Xu ,  Wensheng Yin ,  Guanghong Duan ,  Jinchun Hu

IPC分类号： G03B27/58 ,  G03F7/20

CPC分类号： G03F7/70733 ,  G03F7/70716

摘要： A dual wafer stage exchanging system for a lithographic device is disclosed, said system comprises two wafer stages running between an exposure workstation and a pre-processing workstation, and said two stages are set on a base and suspended above the upper surface of the base by air bearings. Each wafer stages is passed through by a Y-direction guide rail respectively, wherein one end of said guide rail is connected with a main driving unit and another end of said guide rail is detachably coupled with one of the two X-direction auxiliary driving units with single degree of freedom, and said two wafer stages are capable of moving in Y-direction along the guide rails and moving in X-direction under the drive of the auxiliary driving units with single degree of freedom. The position exchange of said two wafer stages can be enabled by the detachment and connection of the Y-direction guide rails and the auxiliary units with single degree of freedom.

摘要翻译： 公开了一种用于光刻设备的双晶片台交换系统，所述系统包括在曝光工作站和预处理工作站之间运行的两个晶片台，并且所述两个阶段被设置在基座上并且悬挂在基座的上表面上方的上表面上方 空气轴承。 每个晶片台分别通过Y方向导轨穿过，其中所述导轨的一端与主驱动单元连接，并且所述导轨的另一端可拆卸地与两个X方向辅助驱动单元中的一个 具有单自由度，并且所述两个晶片台能够沿着导轨在Y方向上移动，并且在辅助驱动单元的驱动下以单自由度在X方向上移动。 所述两个晶片台的位置交换可以通过Y方向导轨和辅助单元以单个自由度的分离和连接来实现。

公开(公告)号：US08860927B2

公开(公告)日：2014-10-14

申请号：US13262829

申请日：2010-04-02

申请人： Yu Zhu ,  Ming Zhang ,  Jingsong Wang ,  Li Tian ,  Dengfeng Xu ,  Wensheng Yin ,  Guanghong Duan ,  Jinchun Hu

发明人： Yu Zhu ,  Ming Zhang ,  Jingsong Wang ,  Li Tian ,  Dengfeng Xu ,  Wensheng Yin ,  Guanghong Duan ,  Jinchun Hu

IPC分类号： G03B27/58 ,  G03F7/20

CPC分类号： G03F7/70733

摘要： A dual-stage exchange system for a lithographic apparatus comprises a silicon chip stage (13) operating in an exposure workstation (3) and a silicon chip (14) stage operating in a pre-processing workstation (4). The two silicon chip stages (13, 14) are provided on the same base stage (1), and suspended on an upper surface (2) of the base stage by air bearings. The two silicon chip stages (13, 14) can move along guide rails (15, 16) in the Y direction. One end of each guide rail (15, 16) is connected to a main driving unit (11, 12), and the other end of each guide rail (15, 16) is butt-jointed with an X-direction single-freedom auxiliary driving unit (7, 8). The silicon chip stages (13, 14) are driven by the single-freedom auxiliary driving units (7, 8) cooperated with the main driving units (11, 12) to move along the X direction. The single-freedom auxiliary driving units (7, 8) can be separated from or precisely butt-jointed with the Y-direction guide rails (15, 16), thereby achieving the position exchange of the two silicon chip stages (13, 14).

摘要翻译： 用于光刻设备的双级交换系统包括在暴露工作站（3）中操作的硅芯片级（13）和在预处理工作站（4）中操作的硅芯片（14）级。 两个硅片级（13,14）设置在同一基台（1）上，并通过空气轴承悬挂在基台的上表面（2）上。 两个硅芯片级（13,14）可沿Y方向的导轨（15,16）移动。 每个导轨（15,16）的一端连接到主驱动单元（11,12），并且每个导轨（15,16）的另一端与X方向单自由度辅助 驱动单元（7,8）。 硅片级（13,14）由与主驱动单元（11,12）配合的单自由度辅助驱动单元（7,8）驱动以沿X方向移动。 单向辅助驱动单元（7,8）可以与Y方向导轨（15,16）分离或精确对接，从而实现两个硅芯片级（13,14）的位置交换， 。

公开(公告)号：US20100208227A1

公开(公告)日：2010-08-19

申请号：US12669671

申请日：2008-03-14

申请人： Yu Zhu ,  Ming Zhang ,  Jinsong Wang ,  Guang Li ,  Dengfeng Xu ,  Wensheng Yin ,  Guanghong Duan ,  Kaiming Yang

发明人： Yu Zhu ,  Ming Zhang ,  Jinsong Wang ,  Guang Li ,  Dengfeng Xu ,  Wensheng Yin ,  Guanghong Duan ,  Kaiming Yang

IPC分类号： G03B27/58

CPC分类号： G03F7/70725 ,  G03F7/70733

摘要： A dual-stage switching system for lithographic machine includes a wafer stage to be operated in an exposure station and another wafer stage to be operated in a pre-processing station. The two wafer stages are provided on a base, with four 2-DOF driving units capable of moving along X direction and Y direction being provided along the edge of the base, and the wafer stages being disposed in a space surrounded by the four 2-DOF driving units and suspended on an upper surface of the base by air bearings. Each of the 2-DOF driving units includes upper and lower linear guides and a guiding sleeve, with the upper and lower linear guides being installed vertical to each other in their corresponding guiding sleeve. Two adjacent 2-DOF driving units cooperatively drive the wafer stage) to move in the X direction and Y direction.

摘要翻译： 用于光刻机的双级切换系统包括在曝光站中操作的晶片台和在预处理站中操作的另一晶片台。 两个晶片台设置在基座上，四个2-DOF驱动单元能够沿着X方向移动，Y方向沿着基座的边缘设置，并且晶片台被布置在由四个2- DOF驱动单元，并通过空气轴承悬挂在基座的上表面上。 每个2自由度驱动单元包括上和下线性引导件和引导套筒，其中上和下线性引导件在其相应的导向套筒中彼此垂直地安装。 两个相邻的2-DOF驱动单元协同驱动晶片台）沿X方向和Y方向移动。

公开(公告)号：US06884822B2

公开(公告)日：2005-04-26

申请号：US10117921

申请日：2002-04-05

申请人： Shiho Wang ,  Yasar Halefoglu ,  Chih-hsing Cheng ,  Dengfeng Xu ,  David Kwong Nung Chan ,  Meng-ying Chen ,  Chinh Do

发明人： Shiho Wang ,  Yasar Halefoglu ,  Chih-hsing Cheng ,  Dengfeng Xu ,  David Kwong Nung Chan ,  Meng-ying Chen ,  Chinh Do

IPC分类号： C03B19/12 ,  C04B35/624 ,  C01B33/158 ,  C03C3/00

CPC分类号： C04B35/62655 ,  C03B19/12 ,  C03C3/06 ,  C04B35/624 ,  C04B2235/3418 ,  Y10T428/249969

摘要： A method of manufacturing a xerogel monolith having a pore diameter distribution includes preparing a first solution comprising metal alkoxide and preparing a second solution comprising a catalyst. A third solution is prepared by mixing the first solution and the second solution together. At least one of the first, second, and third solutions is cooled to achieve a mixture temperature for the third solution which is substantially below room temperature, wherein the third solution has a significantly longer gelation time at the mixture temperature as compared to a room temperature gelation time for the third solution. The method further includes allowing the third solution to gel, thereby forming a wet gel monolith. The method further includes forming the xerogel monolith by drying the wet gel monolith.

摘要翻译： 制造具有孔径分布的干凝胶整料的方法包括制备包含金属醇盐的第一溶液并制备包含催化剂的第二溶液。 通过将第一溶液和第二溶液混合在一起来制备第三溶液。 将第一溶液，第二溶液和第三溶液中的至少一种冷却以达到基本上低于室温的第三溶液的混合物温度，其中第三溶液在混合物温度下与室温相比具有显着更长的凝胶化时间 第三种溶液的凝胶化时间。 该方法还包括使第三溶液凝胶化，从而形成湿凝胶整料。 该方法还包括通过干燥湿凝胶整料来形成干凝胶整料。

公开(公告)号：US09455650B2

公开(公告)日：2016-09-27

申请号：US13522788

申请日：2011-01-18

申请人： Jinchun Hu ,  Yu Zhu ,  Jinsong Wang ,  Ming Zhang ,  Kai Liao ,  Kaiming Yang ,  Dengfeng Xu ,  Wensheng Yin ,  Guanghong Duan

发明人： Jinchun Hu ,  Yu Zhu ,  Jinsong Wang ,  Ming Zhang ,  Kai Liao ,  Kaiming Yang ,  Dengfeng Xu ,  Wensheng Yin ,  Guanghong Duan

IPC分类号： G06F17/11 ,  H02N15/00 ,  G01D5/14

CPC分类号： H02N15/00 ,  G01D5/145

摘要： A two-dimensional locating method of a motion platform based on a magnetic steel array involves the following steps: placing more than four linear Hall sensors at any different positions within one or more polar distances of the magnetic steel array on the surface of the motion platform in a motion system; determining a magnetic flux density distribution model according to the magnetic steel array; determining the mounting positions of the above-mentioned linear Hall sensors, which are converted into phases with respect to the mass center of the motion platform; recording the magnetic flux density measured values of the linear Hall sensors as the motion proceeds; solving the phases of the mass center of the motion platform in a plane, with the measured values being served as observed quantities and the magnetic flux density distribution model being served as a computation model; and determining the position of the mass center of the motion platform with respect to an initial phase according to the phase, so as to realize the planar location of the motion platform. The present invention provides a simple, fast and robust method for computing mass center positions for a motion system containing a magnetic steel array.

摘要翻译： 基于磁钢阵列的运动平台的二维定位方法包括以下步骤：将多于四个线性霍尔传感器放置在运动平台表面上的磁钢阵列的一个或多个极距离内的任何不同位置 在运动系统中 根据磁钢阵列确定磁通密度分布模型; 确定上述线性霍尔传感器的安装位置，其相对于运动平台的质心转换成相位; 在运动过程中记录线性霍尔传感器的磁通密度测量值; 解决平面中运动平台质心的相位，测量值作为观测量，磁通密度分布模型用作计算模型; 并根据相位确定运动平台的质量中心相对于初始相位的位置，以便实现运动平台的平面位置。 本发明提供了一种用于计算包含磁钢阵列的运动系统的质心位置的简单，快速和鲁棒的方法。

公开(公告)号：US20120127448A1

公开(公告)日：2012-05-24

申请号：US13262802

申请日：2010-05-25

申请人： Yu Zhu ,  Ming Zhang ,  Jingsong Wang ,  Li Tian ,  Dengfeng Xu ,  Wensheng Yin ,  Guanghong Duan ,  Jinchun Hu

发明人： Yu Zhu ,  Ming Zhang ,  Jingsong Wang ,  Li Tian ,  Dengfeng Xu ,  Wensheng Yin ,  Guanghong Duan ,  Jinchun Hu

IPC分类号： G03B27/58

CPC分类号： G03F7/70733 ,  G03F7/70716

摘要： A dual wafer stage exchanging system for a lithographic device is disclosed, said system comprises two wafer stages running between an exposure workstation and a pre-processing workstation, and said two stages are set on a base and suspended above the upper surface of the base by air bearings. Each wafer stages is passed through by a Y-direction guide rail respectively, wherein one end of said guide rail is connected with a main driving unit and another end of said guide rail is detachably coupled with one of the two X-direction auxiliary driving units with single degree of freedom, and said two wafer stages are capable of moving in Y-direction along the guide rails and moving in X-direction under the drive of the auxiliary driving units with single degree of freedom. The position exchange of said two wafer stages can be enabled by the detachment and connection of the Y-direction guide rails and the auxiliary units with single degree of freedom.

摘要翻译： 公开了一种用于光刻设备的双晶片台交换系统，所述系统包括在曝光工作站和预处理工作站之间运行的两个晶片台，并且所述两个阶段被设置在基座上并且悬挂在基座的上表面上方的上表面上方 空气轴承。 每个晶片台分别通过Y方向导轨穿过，其中所述导轨的一端与主驱动单元连接，并且所述导轨的另一端可拆卸地与两个X方向辅助驱动单元中的一个 具有单自由度，并且所述两个晶片台能够沿着导轨在Y方向上移动，并且在辅助驱动单元的驱动下以单自由度在X方向上移动。 所述两个晶片台的位置交换可以通过Y方向导轨和辅助单元以单个自由度的分离和连接来实现。

公开(公告)号：US20080223786A1

公开(公告)日：2008-09-18

申请号：US11717317

申请日：2007-03-13

申请人： Dengfeng Xu ,  Robert Lee Grenz

发明人： Dengfeng Xu ,  Robert Lee Grenz

IPC分类号： B01D15/08 ,  B29C35/00

CPC分类号： B01J20/282 ,  B01J20/28042 ,  B01J20/28054 ,  B01J35/04 ,  B01J2220/82 ,  G01N30/56 ,  G01N30/6052 ,  G01N2030/528 ,  Y10T428/22 ,  Y10T428/249953 ,  Y10T428/249967 ,  Y10T428/24997 ,  Y10T428/249987 ,  Y10T428/24999

摘要： Articles of manufacture and devices and methods of forming and using the same are provided, wherein the article comprises a porous inorganic substrate contained in or bounded by a support made from an inorganic material are provided, wherein said porous substrate and support are heated to a temperature effective to shrink the support onto the porous substrate such that liquid tight contact is formed between the porous substrate and the support. In a preferred aspect, the porous inorganic substrate has a porosity of at least 5%, and is a porous monolith formed using a sol-gel method. The articles thus formed provide a confined fluid flow through the porous substrate, providing superior performance in separations, catalysis, filtration, and the like.

摘要翻译： 提供了制造方法及其形成和使用方法，其中所述制品包括由无机材料制成的载体包含或限制在其中的多孔无机基材，其中将所述多孔基材和载体加热至 有效地将载体收缩到多孔基材上，使得在多孔基材和载体之间形成液密接触。 在一个优选的方面，多孔无机基材具有至少5％的孔隙率，并且是使用溶胶 - 凝胶法形成的多孔整料。 如此形成的制品提供了通过多孔基材的限制流体流动，在分离，催化，过滤等方面提供了优异的性能。

公开(公告)号：US07125912B2

公开(公告)日：2006-10-24

申请号：US10215353

申请日：2002-08-07

申请人： Shiho Wang ,  Yasar Halefoglu ,  Chih-hsing Cheng ,  Dengfeng Xu ,  David Kwong Nung Chan ,  Meng-ying Chen ,  Chinh Do

发明人： Shiho Wang ,  Yasar Halefoglu ,  Chih-hsing Cheng ,  Dengfeng Xu ,  David Kwong Nung Chan ,  Meng-ying Chen ,  Chinh Do

IPC分类号： C01B33/158 ,  C03C3/00

CPC分类号： C03B19/12 ,  C03C3/06 ,  C04B35/624 ,  C04B35/62655 ,  C04B2235/3418 ,  Y10T428/249969

摘要： A method of preparing a solution for forming a doped gel monolith includes providing a first substance including a metal alkoxide. The method further includes providing a second substance including a catalyst. The method further includes providing a chemical including a dopant. The method further includes forming a solution including the dopant, said forming including mixing the first substance and the second substance together. The method further includes cooling the solution to a mixture temperature which is at or below zero degrees Celsius, wherein the solution has a significantly longer gelation time at the mixture temperature than at room temperature.

公开(公告)号：US20130024157A1

公开(公告)日：2013-01-24

申请号：US13522788

申请日：2011-01-18

申请人： Jinchun Hu ,  Yu Zhu ,  Jinsong Wang ,  Ming Zhang ,  Kai Liao ,  Kaiming Yang ,  Dengfeng Xu ,  Wensheng Yin ,  Guanghong Duan

发明人： Jinchun Hu ,  Yu Zhu ,  Jinsong Wang ,  Ming Zhang ,  Kai Liao ,  Kaiming Yang ,  Dengfeng Xu ,  Wensheng Yin ,  Guanghong Duan

IPC分类号： G06F17/11 ,  G01B7/14

CPC分类号： H02N15/00 ,  G01D5/145

摘要： A two-dimensional locating method of a motion platform based on a magnetic steel array involves the following steps: placing more than four linear Hall sensors at any different positions within one or more polar distances of the magnetic steel array on the surface of the motion platform in a motion system; determining a magnetic flux density distribution model according to the magnetic steel array; determining the mounting positions of the above-mentioned linear Hall sensors, which are converted into phases with respect to the mass center of the motion platform; recording the magnetic flux density measured values of the linear Hall sensors as the motion proceeds; solving the phases of the mass center of the motion platform in a plane, with the measured values being served as observed quantities and the magnetic flux density distribution model being served as a computation model; and determining the position of the mass center of the motion platform with respect to an initial phase according to the phase, so as to realize the planar location of the motion platform. The present invention provides a simple, fast and robust method for computing mass center positions for a motion system containing a magnetic steel array.

摘要翻译： 基于磁钢阵列的运动平台的二维定位方法包括以下步骤：将多于四个线性霍尔传感器放置在运动平台表面上的磁钢阵列的一个或多个极距离内的任何不同位置 在运动系统中 根据磁钢阵列确定磁通密度分布模型; 确定上述线性霍尔传感器的安装位置，其相对于运动平台的质心转换成相位; 在运动过程中记录线性霍尔传感器的磁通密度测量值; 解决平面中运动平台质心的相位，测量值作为观测量，磁通密度分布模型用作计算模型; 并根据相位确定运动平台的质量中心相对于初始相位的位置，以便实现运动平台的平面位置。 本发明提供了一种用于计算包含磁钢阵列的运动系统的质心位置的简单，快速和鲁棒的方法。

公开(公告)号：US20100187917A1

公开(公告)日：2010-07-29

申请号：US12666055

申请日：2008-03-14

申请人： Yu Zhu ,  Jinsong Wang ,  Ming Zhang ,  Guang Li ,  Dengfeng Xu ,  Wensheng Yin ,  Guanghong Duan ,  Kaiming Yang

发明人： Yu Zhu ,  Jinsong Wang ,  Ming Zhang ,  Guang Li ,  Dengfeng Xu ,  Wensheng Yin ,  Guanghong Duan ,  Kaiming Yang

IPC分类号： H02K41/035

CPC分类号： G03F7/70758 ,  G03F7/70725

摘要： A micro stage with 6 degrees of freedom used in super-precise processing and sensing equipment filed is disclosed. The micro stage has three sets of electromagnetic driving units arranged in a horizontal plane for driving the micro stage to obtain movements within the horizontal plane with 3 degrees of freedom in X, Y and θz directions and three electromagnetic driving units arranged in a vertical direction for driving the micro stage to obtain additional movements with 3 degrees of freedom in Z, θx and θy directions. Direct driving by electromagnetic force is used in the invention, resulting in advantages over stacked structures of having a simple structure, a compact profile, a low driven weight center, low stator inertia, etc. Thus, there is no mechanical friction and damping, and high displacement resolution can be provided. The positioning error of a wafer table of a lithographic machine can be compensated, and the leveling and focusing of the lithographic machine can be achieved. The invention is also applicable in super-precise processing and sensing fields for achieving 6 degree-of-freedom motions. The micro stage, which operates on the basis of Lorentz Law, provides a linear relation between the output pushing force and the input electrical current, and thus the movement control technique for it can be well established.

摘要翻译： 公开了一种用于超精密加工和感测设备的6自由度的微型台。 微型平台具有三组电磁驱动单元，其布置在水平面中，用于驱动微型平台，以在X，Y和...以及z方向上获得3度自由度的水平面内的移动;以及垂直布置的三个电磁驱动单元 方向用于驱动微型平台，以获得Z，...，x和y方向的3个自由度的附加运动。 本发明中采用电磁力直接驱动，结构优越，结构简单，结构紧凑，主动重量低，定子惯性低等优点。因此，不存在机械摩擦和阻尼， 可以提供高位移分辨率。 可以补偿平版印刷机的晶片台的定位误差，并且可以实现平版印刷机的调平和聚焦。 本发明也适用于实现6自由度运动的超精密加工和感测领域。 基于洛伦兹定律运行的微型平台提供了输出推力与输入电流之间的线性关系，因此可以很好地建立起来的运动控制技术。