Invention Application
- Patent Title: MEMS ELECTROSTATIC ACTUATOR
- Patent Title (中): MEMS静电执行器
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Application No.: US13614936Application Date: 2012-09-13
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Publication No.: US20140076697A1Publication Date: 2014-03-20
- Inventor: Arun K. Gupta , William C. McDonald
- Applicant: Arun K. Gupta , William C. McDonald
- Applicant Address: US TX Dallas
- Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee Address: US TX Dallas
- Main IPC: B81B3/00
- IPC: B81B3/00

Abstract:
A MEMS electrostatic actuator includes a bottom plate affixed to a substrate and a top plate suspended above the bottom plate. The top plate has a parallel plate center section and two rotating members electrically connected to the center section. Each rotating member is attached centrally of the rotating member for rotation about an axis of rotation to a set of anchor posts. The attachment includes at least one pair of torsional springs attached along each axis, each spring comprising a rectangular metal square that twists as the rotational members rotate. Electrostatic pull-down electrodes are underneath each rotational member.
Public/Granted literature
- US09040854B2 MEMS electrostatic actuator Public/Granted day:2015-05-26
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