发明申请
US20140077057A1 3D-STACKED BACKSIDE ILLUMINATED IMAGE SENSOR AND METHOD OF MAKING THE SAME
有权
3D堆叠式背光照明图像传感器及其制作方法
- 专利标题: 3D-STACKED BACKSIDE ILLUMINATED IMAGE SENSOR AND METHOD OF MAKING THE SAME
- 专利标题(中): 3D堆叠式背光照明图像传感器及其制作方法
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申请号: US13616850申请日: 2012-09-14
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公开(公告)号: US20140077057A1公开(公告)日: 2014-03-20
- 发明人: Calvin Yi-Ping CHAO , Kuo-Yu CHOU , Fu-Lung HSUEH
- 申请人: Calvin Yi-Ping CHAO , Kuo-Yu CHOU , Fu-Lung HSUEH
- 申请人地址: TW Hsin-Chu
- 专利权人: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- 当前专利权人: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- 当前专利权人地址: TW Hsin-Chu
- 主分类号: H01L27/146
- IPC分类号: H01L27/146 ; H01L31/18
摘要:
A stacked image sensor and method for making the same are provided. The stacked image sensor includes an upper chip with a pixel array thereon. The second chip includes a plurality of column circuits and row circuits associated with the columns and rows of the pixel array and disposed in respective column circuit and row circuit regions that are arranged in multiple groups. Inter-chip bonding pads are formed on each of the chips. The inter-chip bonding pads on the second chip are arranged linearly and are contained within the column circuit regions and row circuit regions in one embodiment. In other embodiments, the inter-chip bonding pads are staggered with respect to each other. In some embodiments, the rows and columns of the pixel array include multiple signal lines and the corresponding column circuit regions and row circuit regions also include multiple inter-chip bonding pads.
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