发明申请
US20140083190A1 ACCELERATION SENSOR AND METHOD FOR OPERATING AN ACCELERATION SENSOR 有权
加速度传感器和运行加速度传感器的方法

ACCELERATION SENSOR AND METHOD FOR OPERATING AN ACCELERATION SENSOR
摘要:
An acceleration sensor has a substrate, a seismic mass and a detection unit. The seismic mass is configured to be deflected based on an external acceleration acting on the acceleration sensor, the deflection being in the form of a deflection motion with respect to the substrate along a deflection direction. The detection unit is configured to be deflected for the detection of a deflection of the seismic mass, the detection being in the form of a detection motion with respect to the substrate along a detection direction. The detection unit is connected to the seismic mass in such a way that the amplitude of the deflection motion along the deflection direction is greater than the amplitude of the detection motion along the detection direction.
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