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1.发明授权Method for operating and/or for measuring a micromechanical device, and micromechanical device 有权用于操作和/或测量微机械装置的方法和微机械装置公开(公告)号：US09291455B2
公开(公告)日：2016-03-22
申请号：US13918556
申请日：2013-06-14
IPC分类号： G01C19/56 , G01C19/5719 , G01C19/5747 , G01C19/574
CPC分类号： G01C19/56 , G01C19/5719 , G01C19/574 , G01C19/5747
摘要： A method for operating and/or measuring a micromechanical device. The device has a first and second seismic mass which are movable by oscillation relative to a substrate; a first drive device for deflecting the first seismic mass and a second drive device for deflecting the second seismic mass, parallel to a drive direction in a first orientation; a third drive device for deflecting the first seismic mass, and a fourth drive device for deflecting the second seismic mass in parallel to the drive direction and according to a second orientation opposite from the first orientation; a first detection device for detecting drive motion of the first seismic mass; and a second detection device for detecting drive motion of the second seismic mass. A first and a second detection signal are generated by the first and second detection devices, the first detection signal being evaluated separately from the second detection signal.
摘要翻译： 一种用于操作和/或测量微机械装置的方法。 该装置具有第一和第二震动块，它们通过相对于基底振动而移动; 第一驱动装置，用于偏转第一抗震块;以及第二驱动装置，用于使第二抗震块平行于第一取向的驱动方向; 第三驱动装置，用于偏转所述第一抗震块;以及第四驱动装置，用于使所述第二抗震块平行于所述驱动方向并且根据与所述第一方向相反的第二方位偏转; 第一检测装置，用于检测第一抗震块的驱动运动; 以及用于检测第二地震块的驱动运动的第二检测装置。 第一和第二检测信号由第一和第二检测装置产生，第一检测信号与第二检测信号分开评估。
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公开(公告)号：US08336382B2
公开(公告)日：2012-12-25
申请号：US12610961
申请日：2009-11-02
IPC分类号： G01P15/125
CPC分类号： G01P15/0802 , G01P15/125 , G01P2015/0831 , Y10T29/49124
摘要： An acceleration sensor is described that has a base substrate, a first electrode structure situated in stationary fashion relative to the base substrate, a sensor element having a first electrode area, and a spring device having at least one spring element. Via the spring element, the sensor element is coupled to the base substrate so that the sensor element is deflected relative to the base substrate as the result of an acceleration acting on the sensor element, thus changing the distance between the first electrode structure and the first electrode area. The sensor element and the first electrode structure are situated at least partially one over the other and are formed from a common functional layer.
摘要翻译： 描述了一种加速度传感器，其具有基底基板，相对于基底基板以固定方式设置的第一电极结构，具有第一电极区域的传感器元件和具有至少一个弹簧元件的弹簧装置。 通过弹簧元件，传感器元件联接到基底基板，使得由于作用在传感器元件上的加速度，传感器元件相对于基底基板偏转，从而改变第一电极结构与第一电极结构之间的距离 电极区域。 传感器元件和第一电极结构至少部分地位于另一个之上，并且由公共功能层形成。
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公开(公告)号：US20110226059A1
公开(公告)日：2011-09-22
申请号：US12737944
申请日：2009-08-04
CPC分类号： G01P15/0802 , B81B3/0051 , B81B2201/0235 , B81B2203/058 , B81C2203/0109 , G01P2015/0831 , Y10T29/49124
摘要： A sensor having a substrate, a cap and a seismic mass is proposed, the substrate having a main extension plane, the seismic mass being deflectable perpendicular to the main extension plane, a first stop of the cap covering a first area of the seismic mass perpendicular to the main extension plane in a first coverage region and a second stop of the cap covering a second area of the seismic mass perpendicular to the main extension plane in a second coverage region, and furthermore the first and second coverage regions parallel to the main extension plane being essentially equal in size. The distances of the coverage regions from a pivot axis of the mass designed as a rocker are equal so that the torques caused by electronic forces offset one another.
摘要翻译： 提出了具有基板，盖和抗震块的传感器，所述基板具有主延伸平面，所述地震质量垂直于所述主延伸平面可偏转，所述盖的第一挡块覆盖所述地震质量垂直的第一区域 在第一覆盖区域中的主延伸面和覆盖垂直于第二覆盖区域中的主延伸平面的地震质量的第二区域的盖的第二挡块，此外，平行于主延伸部的第一和第二覆盖区域 平面尺寸基本相等。 覆盖区域与设计为摇臂的质量块的枢转轴线的距离相等，使得由电子力引起的转矩彼此抵消。
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公开(公告)号：US20090152654A1
公开(公告)日：2009-06-18
申请号：US12323653
申请日：2008-11-26
CPC分类号： G01P15/125 , G01P15/0802
摘要： A micromechanical system includes a substrate, a first planar electrode, a second planar electrode, and a third planar electrode. The second planar electrode is movably positioned at a distance above the first planar electrode and the third planar electrode is positioned at a distance above the second electrode.
摘要翻译： 微机械系统包括基板，第一平面电极，第二平面电极和第三平面电极。 第二平面电极可移动地定位在第一平面电极之上的距离处，并且第三平面电极位于第二电极之上的距离处。
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5.发明授权Electrical device having a lubricated joint and a method for lubricating such a joint 有权具有润滑接头的电气装置和用于润滑这种接头的方法公开(公告)号：US09179555B2
公开(公告)日：2015-11-03
申请号：US12159326
申请日：2006-12-11
申请人： Eric Ochs , Ronny Ludwig , Florian Grabmaier , Stephan Henzler , Rainer Straub , Christian Voehringer , Patrick Wellner
发明人： Eric Ochs , Ronny Ludwig , Florian Grabmaier , Stephan Henzler , Rainer Straub , Christian Voehringer , Patrick Wellner
CPC分类号： H05K3/306 , H01R4/024 , H05K3/308 , H05K2201/1059 , H05K2201/10977 , H05K2203/127
摘要： An electrical device, particularly a control unit, having at least one joint having a first joining partner, especially a sleeve, and a second joining partner, especially a pin, the joint between the two joining partners having a junction; at least at the junction an at least partially solidified lubricant being present. Furthermore, in a method for lubricating a joint of an electrical device, the joint having a first joining partner, particularly a sleeve, and a second joining partner, particularly a pin; in a step one of the joining partners being wetted with a lubricant, in a following step the joining partner wetted with the lubricant being joined to the other joining partner and the lubricant subsequently solidifying.
摘要翻译： 一种具有至少一个接头的电气设备，特别是具有第一接合伙伴，特别是套筒的接头，以及具有连接点的两个连接件之间的接头，特别是销子， 至少在接合处存在至少部分固化的润滑剂。 此外，在一种用于润滑电气装置的接头的方法中，所述接头具有第一接合配合体，特别是套筒和第二接合配合体，特别是销; 在接合对象中的一个接合部件被润滑剂润湿的情况下，在接下来的步骤中，润滑剂润湿的接合部件被接合到另一接合部件，润滑剂随后固化。
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6.发明申请Method for manufacturing a cap for a mems component, and hybrid integrated component having such a cap 有权用于制造用于mems组件的盖的方法，以及具有这种盖的混合集成部件公开(公告)号：US20140110800A1
公开(公告)日：2014-04-24
申请号：US14058806
申请日：2013-10-21
申请人： Johannes CLASSEN , Axel Franke , Jens Frey , Heribert Weber , Frank Fischer , Patrick Wellner
发明人： Johannes CLASSEN , Axel Franke , Jens Frey , Heribert Weber , Frank Fischer , Patrick Wellner
CPC分类号： B81C1/00015 , B81B3/0018 , B81B7/0058
摘要： A manufacturing method for a cap, for a hybrid vertically integrated component having a MEMS component a relatively large cavern volume having a low cavern internal pressure, and a reliable overload protection for the micromechanical structure of the MEMS component. A cap structure is produced in a flat cap substrate in a multistep anisotropic etching, and includes at least one mounting frame having at least one mounting surface and a stop structure, on the cap inner side, having at least one stop surface, the surface of the cap substrate being masked for the multistep anisotropic etching with at least two masking layers made of different materials, and the layouts of the masking layers and the number and duration of the etching steps being selected so that the mounting surface, the stop surface, and the cap inner side are situated at different surface levels of the cap structure.
摘要翻译： 一种用于具有MEMS部件的混合垂直集成部件的盖的制造方法，具有较低的洞穴内部压力的相对较大的洞穴体积以及用于MEMS部件的微机械结构的可靠的过载保护。 在多步骤各向异性蚀刻中，在平盖基板中制造盖结构，并且包括至少一个安装框架，该安装框架具有至少一个安装表面和止动结构，在盖内侧具有至少一个止动表面， 掩模基板被掩模用于具有由不同材料制成的至少两个掩模层的多步各向异性蚀刻，并且选择掩模层的布局以及蚀刻步骤的数量和持续时间，使得安装表面，止动表面和 帽内侧位于帽结构的不同表面水平处。
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7.发明授权公开(公告)号：US07878061B2
公开(公告)日：2011-02-01
申请号：US12323653
申请日：2008-11-26
IPC分类号： H01L21/76
CPC分类号： G01P15/125 , G01P15/0802
摘要： A micromechanical system includes a substrate, a first planar electrode, a second planar electrode, and a third planar electrode. The second planar electrode is movably positioned at a distance above the first planar electrode and the third planar electrode is positioned at a distance above the second electrode.
摘要翻译： 微机械系统包括基板，第一平面电极，第二平面电极和第三平面电极。 第二平面电极可移动地定位在第一平面电极之上的距离处，并且第三平面电极位于第二电极之上的距离处。
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公开(公告)号：US09266720B2
公开(公告)日：2016-02-23
申请号：US14059202
申请日：2013-10-21
申请人： Johannes Classen , Axel Franke , Jens Frey , Heribert Weber , Frank Fischer , Patrick Wellner , Mirko Hattass , Daniel Christoph Meisel
发明人： Johannes Classen , Axel Franke , Jens Frey , Heribert Weber , Frank Fischer , Patrick Wellner , Mirko Hattass , Daniel Christoph Meisel
IPC分类号： B81C1/00
CPC分类号： B81C1/00246 , B81C1/0023 , B81C2203/075 , B81C2203/0771 , H01L2224/48463
摘要： A component has at least one MEMS element and at least one cap made of a semiconductor material. The cap, in addition to its mechanical function as a terminus of a cavity and protection of the micromechanical structure, is provided with an electrical functionality. The micromechanical structure of the MEMS element of the component is situated in a cavity between a carrier and the cap, and includes at least one structural element which is deflectable out of the component plane within the cavity. The cap includes at least one section extending over the entire thickness of the cap, which is electrically insulated from the adjoining semiconductor material in such a way that it may be electrically contacted independently from the remaining sections of the cap.
摘要翻译： 元件具有至少一个MEMS元件和由半导体材料制成的至少一个盖。 盖子除了作为空腔的终端的机械功能以及微机械结构的保护之外，还具有电功能。 元件的MEMS元件的微机械结构位于载体和盖之间的空腔中，并且包括至少一个结构元件，其可在空腔内偏离组件平面。 该帽包括至少一个在盖的整个厚度上延伸的部分，其与相邻的半导体材料电绝缘，使得其可以独立于帽的其余部分电接触。
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9.发明授权Method for manufacturing a cap for a MEMS component, and hybrid integrated component having such a cap 有权用于制造用于MEMS部件的盖的方法和具有这种盖的混合集成部件公开(公告)号：US09040336B2
公开(公告)日：2015-05-26
申请号：US14058806
申请日：2013-10-21
申请人： Johannes Classen , Axel Franke , Jens Frey , Heribert Weber , Frank Fischer , Patrick Wellner
发明人： Johannes Classen , Axel Franke , Jens Frey , Heribert Weber , Frank Fischer , Patrick Wellner
CPC分类号： B81C1/00015 , B81B3/0018 , B81B7/0058
摘要： A manufacturing method for a cap, for a hybrid vertically integrated component having a MEMS component a relatively large cavern volume having a low cavern internal pressure, and a reliable overload protection for the micromechanical structure of the MEMS component. A cap structure is produced in a flat cap substrate in a multistep anisotropic etching, and includes at least one mounting frame having at least one mounting surface and a stop structure, on the cap inner side, having at least one stop surface, the surface of the cap substrate being masked for the multistep anisotropic etching with at least two masking layers made of different materials, and the layouts of the masking layers and the number and duration of the etching steps being selected so that the mounting surface, the stop surface, and the cap inner side are situated at different surface levels of the cap structure.
摘要翻译： 一种用于具有MEMS部件的混合垂直集成部件的盖的制造方法，具有较低的洞穴内部压力的相对较大的洞穴体积以及用于MEMS部件的微机械结构的可靠的过载保护。 在多步骤各向异性蚀刻中，在平盖基板中制造盖结构，并且包括至少一个安装框架，该安装框架具有至少一个安装表面和止动结构，在盖内侧具有至少一个止动表面， 掩模基板被掩模用于具有由不同材料制成的至少两个掩模层的多步各向异性蚀刻，并且选择掩模层的布局以及蚀刻步骤的数量和持续时间，使得安装表面，止动表面和 帽内侧位于帽结构的不同表面水平处。
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公开(公告)号：US20130176825A1
公开(公告)日：2013-07-11
申请号：US13729709
申请日：2012-12-28
IPC分类号： G01V1/18
CPC分类号： G01V1/18 , G01C19/5747
摘要： A sensor structure includes a substrate having a main extension plane, a first seismic mass and a second seismic mass, the first and the second seismic masses being deflectable relative to the substrate along a direction of deflection essentially perpendicular to the main extension plane. The first and second seismic masses are coupled together via a rigid coupling rocker pivotable around a rocker axis parallel to the main extension plane. The first seismic mass is suspended from the substrate with the aid of a first suspension spring, and an essentially rigid first coupling bar is situated between the first suspension spring and the first seismic mass.
摘要翻译： 传感器结构包括具有主延伸平面的基板，第一地震块和第二地震块，第一和第二地震块相对于基板沿着基本上垂直于主延伸平面的偏转方向可偏转。 第一和第二地震块通过刚性耦合摇杆联接在一起，所述刚性联轴器可围绕平行于主延伸平面的摇臂轴线枢转。 借助于第一悬架弹簧，第一抗震块从衬底悬挂，并且基本上刚性的第一联接杆位于第一悬架弹簧和第一抗震块之间。
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