Invention Application
US20140083363A1 PATTERNING OF MAGNETIC THIN FILM USING ENERGIZED IONS AND THERMAL EXCITATION
审中-公开
使用能量离子和热激发形成磁薄膜的方法
- Patent Title: PATTERNING OF MAGNETIC THIN FILM USING ENERGIZED IONS AND THERMAL EXCITATION
- Patent Title (中): 使用能量离子和热激发形成磁薄膜的方法
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Application No.: US14047384Application Date: 2013-10-07
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Publication No.: US20140083363A1Publication Date: 2014-03-27
- Inventor: Omkaram NALAMASU , Steven VERHAVERBEKE , Majeed A. FOAD , Mahalingam VENKATESAN , Nety M. KRISHNA
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Main IPC: G11B5/84
- IPC: G11B5/84
Abstract:
A method for patterning a magnetic thin film on a substrate includes: providing a pattern about the magnetic thin film, with selective regions of the pattern permitting penetration of energized ions of one or more elements. Energized ions are generated with sufficient energy to penetrate selective regions and a portion of the magnetic thin film adjacent the selective regions. The substrate is placed to receive the energized ions. The portion of the magnetic thin film is subjected to thermal excitation. The portions of the magnetic thin film are rendered to exhibit a magnetic property different than selective other portions. A method for patterning a magnetic media with a magnetic thin film on both sides of the media is also disclosed.
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