Invention Application
- Patent Title: TRI-AXIAL MEMS INERTIAL SENSOR
- Patent Title (中): 三轴MEMS惯性传感器
-
Application No.: US13844956Application Date: 2013-03-16
-
Publication No.: US20140090468A1Publication Date: 2014-04-03
- Inventor: Yee-Chung Fu
- Applicant: Advanced NuMicro Systems, Inc.
- Applicant Address: US CA San Jose
- Assignee: Advanced NuMicro Systems, Inc.
- Current Assignee: Advanced NuMicro Systems, Inc.
- Current Assignee Address: US CA San Jose
- Main IPC: B81B3/00
- IPC: B81B3/00 ; G01P15/14

Abstract:
A micro-electromechanical systems (MEMS) inertial sensor includes first, second, and third fixed electrodes, a first translational element to translate along a first direction, first mobile electrodes extending from the first translation element and being interdigitated with the first fixed electrodes to form first sensor assemblies, a second translation element to translate along a second direction, second mobile electrodes extending from the second translation element and being interdigitated with the second fixed electrodes to form second sensor assemblies, and a rotation element to rotate about the second direction, the rotation element having a surface opposite the third fixed electrodes to form third sensor assemblies, wherein the third fixed electrode being displaced from the surface of the rotation element along a third direction.
Information query