公开(公告)号：US20140090468A1

公开(公告)日：2014-04-03

申请号：US13844956

申请日：2013-03-16

Applicant: Advanced NuMicro Systems, Inc.

Inventor： Yee-Chung Fu

IPC: B81B3/00 ,  G01P15/14

CPC classification number: B81B3/0021 ,  G01P15/125 ,  G01P15/14 ,  G01P15/18 ,  G01P2015/0814 ,  G01P2015/0828

Abstract: A micro-electromechanical systems (MEMS) inertial sensor includes first, second, and third fixed electrodes, a first translational element to translate along a first direction, first mobile electrodes extending from the first translation element and being interdigitated with the first fixed electrodes to form first sensor assemblies, a second translation element to translate along a second direction, second mobile electrodes extending from the second translation element and being interdigitated with the second fixed electrodes to form second sensor assemblies, and a rotation element to rotate about the second direction, the rotation element having a surface opposite the third fixed electrodes to form third sensor assemblies, wherein the third fixed electrode being displaced from the surface of the rotation element along a third direction.

Abstract translation: 微机电系统（MEMS）惯性传感器包括第一固定电极，第二固定电极和第三固定电极，沿着第一方向平移的第一平移元件，从第一平移元件延伸并与第一固定电极交叉的第一移动电极，以形成 第一传感器组件，沿着第二方向平移的第二平移元件，从第二平移元件延伸并与第二固定电极交叉的第二移动电极，以形成第二传感器组件;以及围绕第二方向旋转的旋转元件， 旋转元件具有与第三固定电极相对的表面，以形成第三传感器组件，其中第三固定电极沿着第三方向从旋转元件的表面移位。

公开(公告)号：US20130241546A1

公开(公告)日：2013-09-19

申请号：US13844958

申请日：2013-03-16

Applicant: ADVANCED NUMICRO SYSTEMS, INC.

Inventor： Yee-Chung Fu

IPC: G01R33/02

CPC classification number: G01R33/02 ,  G01R33/0286

Abstract: A micro-electromechanical systems (MEMS) magnetometer includes first fixed electrodes, second fixed electrodes, a mobile element to rotate about a first rotation axis along a first direction and translate along a second direction orthogonal to the first direction, mobile electrodes extending from the first mobile element and being interdigitated with the first fixed electrodes to form first sensor assemblies, a rotation element coupled to the mobile element to rotate about a second rotation axis along the second direction, the rotation element having a surface opposite the second fixed electrodes to form second sensor assemblies, the second fixed electrode being displaced from the surface of the rotation element along a third direction, and a trace having sections along the first direction and offset from the first rotation axis and along the second direction and offset from the second rotation axis.

Abstract translation: 微机电系统（MEMS）磁强计包括第一固定电极，第二固定电极，沿着第一方向绕第一旋转轴线旋转并沿着与第一方向正交的第二方向平移的移动元件，从第一固定电极 移动元件并与第一固定电极交叉以形成第一传感器组件;旋转元件，其连接到可移动元件，以沿着第二方向绕第二旋转轴线旋转，旋转元件具有与第二固定电极相对的表面，以形成第二传感器组件 传感器组件，第二固定电极沿着第三方向从旋转元件的表面移位，并且轨迹具有沿着第一方向的部分，并且偏离第一旋转轴线并且沿着第二方向偏移并且偏离第二旋转轴线。

公开(公告)号：US09035649B2

公开(公告)日：2015-05-19

申请号：US13844958

申请日：2013-03-16

Applicant: Advanced NuMicro Systems, Inc.

Inventor： Yee-Chung Fu

IPC: G01R33/02 ,  G01R33/028

CPC classification number: G01R33/02 ,  G01R33/0286

Abstract: A micro-electromechanical systems (MEMS) magnetometer includes first fixed electrodes, second fixed electrodes, a mobile element to rotate about a first rotation axis along a first direction and translate along a second direction orthogonal to the first direction, mobile electrodes extending from the first mobile element and being interdigitated with the first fixed electrodes to form first sensor assemblies, a rotation element coupled to the mobile element to rotate about a second rotation axis along the second direction, the rotation element having a surface opposite the second fixed electrodes to form second sensor assemblies, the second fixed electrode being displaced from the surface of the rotation element along a third direction, and a trace having sections along the first direction and offset from the first rotation axis and along the second direction and offset from the second rotation axis.

Abstract translation: 微机电系统（MEMS）磁强计包括第一固定电极，第二固定电极，沿着第一方向绕第一旋转轴线旋转并沿着与第一方向正交的第二方向平移的移动元件，从第一固定电极 移动元件并与第一固定电极交叉以形成第一传感器组件;旋转元件，其连接到可移动元件，以沿着第二方向围绕第二旋转轴线旋转，旋转元件具有与第二固定电极相对的表面，以形成第二传感器组件 传感器组件，第二固定电极沿着第三方向从旋转元件的表面移位，并且轨迹具有沿着第一方向的部分，并且偏离第一旋转轴线并且沿着第二方向偏移并且偏离第二旋转轴线。