发明申请
- 专利标题： LASER OUTPUT MEASUREMENT MECHANISM
- 专利标题（中）： 激光输出测量机制
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申请号： US14123636申请日： 2011-10-11
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公开(公告)号： US20140091198A1公开(公告)日： 2014-04-03
- 发明人: Fumio Shoda , Hidenori Fukahori , Takayuki Yanagisawa , Mitoru Yabe , Tetsuya Nishimura , Shuhei Yamamoto , Yoko Inoue , Tetsuo Funakura
- 申请人： Mitsubishi Electric Corporation
- 申请人地址： JP Tokyo
- 专利权人： Mitsubishi Electric Corporation
- 当前专利权人： Mitsubishi Electric Corporation
- 当前专利权人地址： JP Tokyo
- 国际申请： PCT/JP2011/005683 WO 20111011
- 主分类号： G01J1/04
- IPC分类号： G01J1/04
摘要：
A laser output measurement mechanism includes a light splitter that is disposed in a state rotated by a predetermined angle about an optical axis of laser light incident thereon, and that reflects a part of the laser light according to a Fresnel reflectivity that depends on a polarization direction and an incident angle of the laser light at a reflection surface thereof, and a light detector that measures an intensity of the laser light reflected by the light splitter.
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