发明申请
US20140091282A1 PROCESS FOR FABRICATING METAL BUS LINES FOR OLED LIGHTING PANELS
有权
用于制造OLED照明面板的金属总线的工艺
- 专利标题: PROCESS FOR FABRICATING METAL BUS LINES FOR OLED LIGHTING PANELS
- 专利标题(中): 用于制造OLED照明面板的金属总线的工艺
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申请号: US13788321申请日: 2013-03-07
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公开(公告)号: US20140091282A1公开(公告)日: 2014-04-03
- 发明人: Peter Levermore , Huiqing Pang , Emory Krall , Rajan Kamala , Ruiqing Ma , Paul E. Burrows
- 申请人: Universal Display Corporation (027166)
- 申请人地址: US NJ Ewing
- 专利权人: Universal Display Corporation (027166)
- 当前专利权人: Universal Display Corporation (027166)
- 当前专利权人地址: US NJ Ewing
- 主分类号: H01L51/56
- IPC分类号: H01L51/56 ; H01L51/52
摘要:
Systems and methods for the design and fabrication of OLEDs, including high-performance large-area OLEDs, are provided. Variously described fabrication processes may be used to deposit and pattern bus lines with a smooth profile and a gradual sidewall transition. Such smooth profiles may, for example, reduce the probability of electrical shorting at the bus lines. Accordingly, in certain circumstances, an insulating layer may no longer be considered essential, and may be optionally avoided altogether. In cases where an insulating layer is not used, further enhancements in the emissive area and shelf life of the device may be achieved as well. According to aspects of the invention, bus lines such as those described herein may be deposited, and patterned, using vapor deposition such as vacuum thermal evaporation (VTE) through a shadow mask, and may avoid multiple photolithography steps. Other vapor deposition systems and methods may include, among others, sputter deposition, e-beam evaporation and chemical vapor deposition (CVD). A final profile of the bus line may substantially correspond to the profile as deposited.
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