发明申请
- 专利标题： MAGNETICALLY DRIVABLE MICROMIRROR
- 专利标题（中）： 磁力驱动微型机
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申请号： US13976301申请日： 2011-11-09
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公开(公告)号： US20140092458A1公开(公告)日： 2014-04-03
- 发明人: Stefan Pinter , Heribert Weber , Frank Fischer , Michael Krueger , Joerg Muchow , Christoph Friese
- 申请人： Stefan Pinter , Heribert Weber , Frank Fischer , Michael Krueger , Joerg Muchow , Christoph Friese
- 优先权： DE102010064218.5 20101227
- 国际申请： PCT/EP2011/069698 WO 20111109
- 主分类号： G02B7/182
- IPC分类号： G02B7/182 ; G02B26/12
摘要：
A magnetically drivable micromirror having an outer frame, a coil former, and torsion springs, situated in a first plane, the torsion springs having an axis of rotation, and the coil former being connected to the outer frame by the torsion springs so as to be capable of rotational motion about the axis of rotation, having a mirror element that is situated in a second plane parallel to the first plane, the mirror element being connected to the coil former by an intermediate layer. A 2D scanner having a first magnetically drivable micromirror and a second drivable mirror, and to a method for producing a micromirror are also described.
公开/授权文献
- US09791663B2 Magnetically drivable micromirror 公开/授权日：2017-10-17
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