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公开(公告)号：US20140092458A1
公开(公告)日：2014-04-03
申请号：US13976301
申请日：2011-11-09
申请人： Stefan Pinter , Heribert Weber , Frank Fischer , Michael Krueger , Joerg Muchow , Christoph Friese
发明人： Stefan Pinter , Heribert Weber , Frank Fischer , Michael Krueger , Joerg Muchow , Christoph Friese
CPC分类号： G02B7/1821 , G02B26/085 , G02B26/101 , G02B26/105 , G02B26/12
摘要： A magnetically drivable micromirror having an outer frame, a coil former, and torsion springs, situated in a first plane, the torsion springs having an axis of rotation, and the coil former being connected to the outer frame by the torsion springs so as to be capable of rotational motion about the axis of rotation, having a mirror element that is situated in a second plane parallel to the first plane, the mirror element being connected to the coil former by an intermediate layer. A 2D scanner having a first magnetically drivable micromirror and a second drivable mirror, and to a method for producing a micromirror are also described.
摘要翻译： 具有位于第一平面中的外框架，线圈架和扭力弹簧的磁性可驱动微镜，所述扭转弹簧具有旋转轴线，并且所述线圈架通过所述扭转弹簧连接到所述外框架，从而为 能够围绕旋转轴线旋转运动，具有位于平行于第一平面的第二平面中的反射镜元件，镜元件通过中间层连接到线圈架。 还描述了具有第一磁性驱动微镜和第二可驱动镜的2D扫描仪以及用于制造微镜的方法。
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公开(公告)号：US09791663B2
公开(公告)日：2017-10-17
申请号：US13976301
申请日：2011-11-09
申请人： Stefan Pinter , Heribert Weber , Frank Fischer , Michael Krueger , Joerg Muchow , Christoph Friese
发明人： Stefan Pinter , Heribert Weber , Frank Fischer , Michael Krueger , Joerg Muchow , Christoph Friese
CPC分类号： G02B7/1821 , G02B26/085 , G02B26/101 , G02B26/105 , G02B26/12
摘要： A magnetically drivable micromirror having an outer frame, a coil former, and torsion springs, situated in a first plane, the torsion springs having an axis of rotation, and the coil former being connected to the outer frame by the torsion springs so as to be capable of rotational motion about the axis of rotation, having a mirror element that is situated in a second plane parallel to the first plane, the mirror element being connected to the coil former by an intermediate layer. A 2D scanner having a first magnetically drivable micromirror and a second drivable mirror, and to a method for producing a micromirror are also described.
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3.发明授权Micromechanical component having an inclined structure and corresponding manufacturing method 有权具有倾斜结构的微机械部件和相应的制造方法公开(公告)号：US08847336B2
公开(公告)日：2014-09-30
申请号：US12937093
申请日：2008-11-28
申请人： Tjalf Pirk , Stefan Pinter , Hubert Benzel , Heribert Weber , Michael Krueger , Robert Sattler , Frederic Njikam Njimonzie , Joerg Muchow , Joachim Fritz , Christoph Schelling , Christoph Friese
发明人： Tjalf Pirk , Stefan Pinter , Hubert Benzel , Heribert Weber , Michael Krueger , Robert Sattler , Frederic Njikam Njimonzie , Joerg Muchow , Joachim Fritz , Christoph Schelling , Christoph Friese
IPC分类号： H01L29/788 , B81C1/00
CPC分类号： B81C1/00103 , B81B2203/0118 , B81B2203/0307
摘要： In a micromechanical component having an inclined structure and a corresponding manufacturing method, the component includes a substrate having a surface; a first anchor, which is provided on the surface of the substrate and which extends away from the substrate; and at least one cantilever, which is provided on a lateral surface of the anchor, and which points at an inclination away from the anchor.
摘要翻译： 在具有倾斜结构和相应的制造方法的微机械部件中，该部件包括具有表面的基板; 第一锚，其设置在基板的表面上并且远离基板延伸; 以及至少一个悬臂，其设置在锚固件的侧表面上，并且其倾斜远离锚固件。
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4.发明申请ELECTROSTATIC DRIVE, MICROMECHANICAL COMPONENT, AND MANUFACTURING METHOD FOR AN ELECTROSTATIC DRIVE AND A MICROMECHANICAL COMPONENT 审中-公开静电驱动器，微机电部件和静电驱动器和微机电部件的制造方法公开(公告)号：US20110254404A1
公开(公告)日：2011-10-20
申请号：US13124625
申请日：2009-08-24
申请人： Tjalf Pirk , Stefan Pinter , Michael Krueger , Joerg Muchow , Joachim Fritz , Christoph Friese
发明人： Tjalf Pirk , Stefan Pinter , Michael Krueger , Joerg Muchow , Joachim Fritz , Christoph Friese
CPC分类号： H02N1/006 , Y10T29/49002
摘要： An electrostatic drive is described having an inner frame, at least one intermediate frame, which encloses the inner frame, and an outer frame, which encloses the inner frame and the at least one intermediate frame, each two adjacent frames of the inner, intermediate, and outer frames being connected to one another via at least one spring element, the spring elements, via which each two adjacent frames of the inner, intermediate, and outer frames are connected to one another, being situated in such a way that the longitudinal directions of the spring elements lie on a common longitudinal spring axis, and electrode fingers being situated on frame bars, which are oriented parallel to the longitudinal spring axis, of the inner frame, the at least one intermediate frame, and the outer frame. A manufacturing method for an electrostatic drive, a micromechanical component, and a manufacturing method for a micromechanical component, are also described.
摘要翻译： 描述了一种静电驱动器，其具有内框架，封闭内框架的至少一个中间框架和封闭内框架和至少一个中间框架的外框架，内框架和内框架的每个两个相邻框架， 并且外框架通过至少一个弹簧元件彼此连接，弹簧元件，内框架，中间框架和外框架的每个两个相邻的框架彼此连接，以这样的方式设置：纵向方向 弹簧元件位于公共纵向弹簧轴线上，并且电极指位于内框架，至少一个中间框架和外框架上的平行于纵向弹簧轴线的框架杆上。 还描述了用于静电驱动的制造方法，微机械部件和用于微机械部件的制造方法。
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5.发明申请公开(公告)号：US20110147862A1
公开(公告)日：2011-06-23
申请号：US12937093
申请日：2008-11-28
申请人： Tjalf Pirk , Stefan Pinter , Hubert Benzel , Herbert Weber , Michael Krueger , Robert Sattler , Frederic Njikam Njimonzie , Joerg Muchow , Joachim Fritz , Christoph Schelling , Christoph Friese
发明人： Tjalf Pirk , Stefan Pinter , Hubert Benzel , Herbert Weber , Michael Krueger , Robert Sattler , Frederic Njikam Njimonzie , Joerg Muchow , Joachim Fritz , Christoph Schelling , Christoph Friese
CPC分类号： B81C1/00103 , B81B2203/0118 , B81B2203/0307
摘要： In a micromechanical component having an inclined structure and a corresponding manufacturing method, the component includes a substrate having a surface; a first anchor, which is provided on the surface of the substrate and which extends away from the substrate; and at least one cantilever, which is provided on a lateral surface of the anchor, and which points at an inclination away from the anchor.
摘要翻译： 在具有倾斜结构和相应的制造方法的微机械部件中，该部件包括具有表面的基板; 第一锚，其设置在基板的表面上并且远离基板延伸; 以及至少一个悬臂，其设置在锚固件的侧表面上，并且其倾斜远离锚固件。
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公开(公告)号：US09195054B2
公开(公告)日：2015-11-24
申请号：US13124468
申请日：2009-08-24
申请人： Tjalf Pirk , Stefan Pinter , Joerg Muchow , Joachim Fritz , Christoph Friese
发明人： Tjalf Pirk , Stefan Pinter , Joerg Muchow , Joachim Fritz , Christoph Friese
CPC分类号： G02B26/0833 , B81B3/004 , B81B2201/033 , B81B2203/058 , G02B26/0841 , H02N1/006
摘要： A cascaded micromechanical actuator structure for rotating a micromechanical component about a rotation axis is described. The structure includes a torsion spring device which, on the one hand, is attached to a mount and to which, on the other hand, the micromechanical component is attachable. The torsion spring device has a plurality of torsion springs which run along or parallel to the rotation axis. The structure includes a rotary drive device having a plurality of rotary drives which are connected to the torsion spring device in such a way that each rotary drive contributes a fraction to an overall rotation angle of a micromechanical component about the rotation axis.
摘要翻译： 描述了用于围绕旋转轴线旋转微机械部件的级联微机械致动器结构。 该结构包括一个扭力弹簧装置，一方面，该弹簧装置附接到安装件，另一方面，微型机械部件可附接到该扭力弹簧装置。 扭转弹簧装置具有沿旋转轴线或平行于旋转轴线延伸的多个扭转弹簧。 该结构包括具有多个旋转驱动器的旋转驱动装置，其连接到扭转弹簧装置，使得每个旋转驱动器对微机械部件围绕旋转轴线的整个旋转角贡献分数。
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7.发明申请MICROMECHANICAL COMPONENT AND A METHOD FOR OPERATING A MICROMECHANICAL COMPONENT 有权微机电组件和操作微机电组件的方法公开(公告)号：US20110261428A1
公开(公告)日：2011-10-27
申请号：US12998538
申请日：2009-09-16
申请人： Stefan Pinter , Joerg Muchow , Joachim Fritz , Christoph Friese
发明人： Stefan Pinter , Joerg Muchow , Joachim Fritz , Christoph Friese
CPC分类号： G02B26/0833 , G02B27/01 , Y10S359/90
摘要： A micromechanical component has a light window; a mirror element adjustable with respect to the light window from a first position into at least one second position about at least one axis of rotation, an optical sensor having a detection surface designed to ascertain a light intensity on the detection surface and to provide a corresponding sensor signal. The light window, the mirror element in the first position and the detection surface are situated in relation to one another in such a way that a portion of a light beam reflected on the light window strikes the detection surface at least partially; and an evaluation unit designed to define, on the basis of the sensor signal, information regarding an instantaneous position of the mirror element and/or an instantaneous intensity of the deflected light beam.
摘要翻译： 微机械部件具有光窗口; 相对于所述光窗可从第一位置调节到关于至少一个旋转轴线的至少一个第二位置的反射镜元件;光学传感器，具有被设计成确定所述检测表面上的光强度的检测表面，并且提供对应的 传感器信号。 光窗，第一位置的反射镜元件和检测表面彼此相对设置，使得在光窗上反射的光束的一部分至少部分地撞击检测表面; 以及评估单元，其被设计为基于传感器信号来定义关于镜元件的瞬时位置和/或偏转光束的瞬时强度的信息。
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8.发明申请公开(公告)号：US20130271807A1
公开(公告)日：2013-10-17
申请号：US13864623
申请日：2013-04-17
申请人： Heiko Nitsche , Stefan Pinter , Wolfram Schock , Joerg Muchow , Christoph Friese
发明人： Heiko Nitsche , Stefan Pinter , Wolfram Schock , Joerg Muchow , Christoph Friese
CPC分类号： B81B7/02 , B81B7/0006 , B81B2203/0163 , B81C3/008 , G02B26/085 , Y10T29/49826
摘要： A micromechanical component having a control element is described, which is connected via at least one supply line spring having a supply line spring constant to a mounting support in an adjustable manner, and a drive device having at least one actuator component situated on the control element. Via at least one line component guided over the at least one supply line spring an electric potential or a current signal is able to be provided to the actuator component in such a way that the control element is able to be set by the drive device into a motion with respect to the mounting support. The control element is additionally connected to the mounting support, and the supply line spring constant is less than vibratory spring constant. Also described is a method for producing a micromechanical component.
摘要翻译： 描述了具有控制元件的微机械部件，其通过具有供应线弹簧常数的至少一个供应线弹簧以可调节的方式连接到驱动装置，驱动装置具有位于控制元件上的至少一个致动器部件 。 通过在至少一个供应线弹簧上引导的至少一个线路部件能够以这样的方式将电位或电流信号提供给致动器部件，使得控制元件能够被驱动装置设置成 相对于安装支架的运动。 控制元件另外连接到安装支撑件，并且供应线弹簧常数小于振动弹簧常数。 还描述了一种用于制造微机械部件的方法。
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9.发明授权公开(公告)号：US09045331B2
公开(公告)日：2015-06-02
申请号：US13864623
申请日：2013-04-17
申请人： Heiko Nitsche , Stefan Pinter , Wolfram Schock , Joerg Muchow , Christoph Friese
发明人： Heiko Nitsche , Stefan Pinter , Wolfram Schock , Joerg Muchow , Christoph Friese
CPC分类号： B81B7/02 , B81B7/0006 , B81B2203/0163 , B81C3/008 , G02B26/085 , Y10T29/49826
摘要： A micromechanical component having a control element is described, which is connected via at least one supply line spring having a supply line spring constant to a mounting support in an adjustable manner, and a drive device having at least one actuator component situated on the control element. Via at least one line component guided over the at least one supply line spring an electric potential or a current signal is able to be provided to the actuator component in such a way that the control element is able to be set by the drive device into a motion with respect to the mounting support. The control element is additionally connected to the mounting support, and the supply line spring constant is less than vibratory spring constant. Also described is a method for producing a micromechanical component.
摘要翻译： 描述了具有控制元件的微机械部件，其通过具有供应线弹簧常数的至少一个供应线弹簧以可调整的方式连接到驱动装置，驱动装置具有位于控制元件上的至少一个致动器部件 。 通过在至少一个供应线弹簧上引导的至少一个线路部件能够以这样的方式将电位或电流信号提供给致动器部件，使得控制元件能够被驱动装置设置成 相对于安装支架的运动。 控制元件另外连接到安装支撑件，并且供应线弹簧常数小于振动弹簧常数。 还描述了一种用于制造微机械部件的方法。
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10.发明授权Micromechanical component and a method for operating a micromechanical component 有权微机械部件和微机械部件的操作方法公开(公告)号：US08896897B2
公开(公告)日：2014-11-25
申请号：US12998538
申请日：2009-09-16
申请人： Stefan Pinter , Joerg Muchow , Joachim Fritz , Christoph Friese
发明人： Stefan Pinter , Joerg Muchow , Joachim Fritz , Christoph Friese
CPC分类号： G02B26/0833 , G02B27/01 , Y10S359/90
摘要： A micromechanical component has a light window; a mirror element adjustable with respect to the light window from a first position into at least one second position about at least one axis of rotation, an optical sensor having a detection surface designed to ascertain a light intensity on the detection surface and to provide a corresponding sensor signal. The light window, the mirror element in the first position and the detection surface are situated in relation to one another in such a way that a portion of a light beam reflected on the light window strikes the detection surface at least partially; and an evaluation unit designed to define, on the basis of the sensor signal, information regarding an instantaneous position of the mirror element and/or an instantaneous intensity of the deflected light beam.
摘要翻译： 微机械部件具有光窗口; 相对于所述光窗可从第一位置调节到关于至少一个旋转轴线的至少一个第二位置的反射镜元件;光学传感器，具有被设计成确定所述检测表面上的光强度的检测表面，并且提供对应的 传感器信号。 光窗，第一位置的反射镜元件和检测表面彼此相对设置，使得在光窗上反射的光束的一部分至少部分地撞击检测表面; 以及评估单元，其被设计为基于传感器信号来定义关于镜元件的瞬时位置和/或偏转光束的瞬时强度的信息。
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