发明申请
US20140103210A1 MULTI-STACK FILM BOLOMETER 有权
多层薄膜温度计

MULTI-STACK FILM BOLOMETER
摘要:
A semiconductor device includes a substrate, suspension structures extending from the upper surface of the substrate, and an absorber stack attached to the substrate by the suspension structures. The suspension structures suspend the absorber stack over the substrate such that a gap is defined between the absorber stack and the substrate. The absorber stack includes a plurality of metallization layers interleaved with a plurality of insulating layers. At least one of the metallization layers has a thickness of approximately 10 nm or less.
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