发明申请
- 专利标题: MULTI-STACK FILM BOLOMETER
- 专利标题(中): 多层薄膜温度计
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申请号: US14054923申请日: 2013-10-16
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公开(公告)号: US20140103210A1公开(公告)日: 2014-04-17
- 发明人: Ando Lars Feyh , Po-Jui Chen , Fabian Purkl , Gary Yama , Gary O'Brien
- 申请人: Robert Bosch GmbH
- 申请人地址: DE Stuttgart
- 专利权人: Robert Bosch GmbH
- 当前专利权人: Robert Bosch GmbH
- 当前专利权人地址: DE Stuttgart
- 主分类号: H01L31/09
- IPC分类号: H01L31/09 ; H01L37/02
摘要:
A semiconductor device includes a substrate, suspension structures extending from the upper surface of the substrate, and an absorber stack attached to the substrate by the suspension structures. The suspension structures suspend the absorber stack over the substrate such that a gap is defined between the absorber stack and the substrate. The absorber stack includes a plurality of metallization layers interleaved with a plurality of insulating layers. At least one of the metallization layers has a thickness of approximately 10 nm or less.
公开/授权文献
- US09093594B2 Multi-stack film bolometer 公开/授权日:2015-07-28
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