发明申请
- 专利标题: POLISHING PAD AND MANUFACTURING METHOD THEREFOR
- 专利标题(中): 抛光垫及其制造方法
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申请号: US14111962申请日: 2012-04-16
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公开(公告)号: US20140106652A1公开(公告)日: 2014-04-17
- 发明人: Kouki Itoyama , Fumio Miyazawa
- 申请人: Kouki Itoyama , Fumio Miyazawa
- 申请人地址: JP Chuo-ku
- 专利权人: FUJIBO HOLDINGS INC.
- 当前专利权人: FUJIBO HOLDINGS INC.
- 当前专利权人地址: JP Chuo-ku
- 优先权: JP2011-091283 20110415
- 国际申请: PCT/JP2012/060273 WO 20120416
- 主分类号: H01L21/304
- IPC分类号: H01L21/304 ; B24B37/24 ; B24B37/22
摘要:
Provided are a polishing pad which remedies the problem of scratches occurring when a conventional hard (dry) polishing pad is used, which is excellent in polishing rate and polishing uniformity, and which can be used for not only primary polishing but also finish polishing, and a manufacturing method therefor. The polishing pad is a polishing pad for polishing a semiconductor device, comprising a polishing layer having a polyurethane-polyurea resin foam containing substantially spherical cells, wherein the polyurethane-polyurea resin foam has a Young's modulus E in a range from 450 to 30000 kPa, and a density D in a range from 0.30 to 0.60 g/cm3.
公开/授权文献
- US09011212B2 Polishing pad and manufacturing method therefor 公开/授权日:2015-04-21
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