发明申请
- 专利标题: SEMICONDUCTOR DEVICES AND METHODS FOR MANUFACTURING THE SAME
- 专利标题(中): 半导体器件及其制造方法
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申请号: US13981808申请日: 2012-07-24
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公开(公告)号: US20140110756A1公开(公告)日: 2014-04-24
- 发明人: Huilong Zhu , Qingqing Liang , Huicai Zhong , Hao Wu
- 申请人: Huilong Zhu , Qingqing Liang , Huicai Zhong , Hao Wu
- 申请人地址: CN Beijing
- 专利权人: Institute of Microelectronics, Chinese Academy of Sciences
- 当前专利权人: Institute of Microelectronics, Chinese Academy of Sciences
- 当前专利权人地址: CN Beijing
- 优先权: CN201210247385.2 20120717
- 国际申请: PCT/CN12/79081 WO 20120724
- 主分类号: H01L29/66
- IPC分类号: H01L29/66 ; H01L29/78
摘要:
Semiconductor devices and methods for manufacturing the same are disclosed. In one embodiment, the method comprises: sequentially forming a sacrificial layer and a semiconductor layer on a substrate; forming a first cover layer on the semiconductor layer; forming an opening extending into the substrate with the first cover layer as a mask; selectively removing at least a portion of the sacrificial layer through the opening, and filling an insulating material in a gap due to removal of the sacrificial layer; forming one of source and drain regions in the opening; forming a second cover layer on the substrate; forming the other of the source and drain regions with the second cover layer as a mask; removing a portion of the second cover layer; and forming a gate dielectric layer, and forming a gate conductor in the form of spacer on a sidewall of a remaining portion of the second cover layer.
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