发明申请
- 专利标题： ELECTROSTATIC DISCHARGE COMPATIBLE DICING TAPE WITH LASER SCRIBE CAPABILITY
- 专利标题（中）： 静电放电兼容贴片带激光扫描能力
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申请号： US13993336申请日： 2011-12-22
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公开(公告)号： US20140120293A1公开(公告)日： 2014-05-01
- 发明人: Mohit Gupta , Haiwei Lu , Dingying D. Xu , Ninad Patel , Kowtilya Bijjula , P. Erasenthiran Poonjolai
- 申请人： Mohit Gupta , Haiwei Lu , Dingying D. Xu , Ninad Patel , Kowtilya Bijjula , P. Erasenthiran Poonjolai
- 国际申请： PCT/US11/66901 WO 20111222
- 主分类号： H01L21/683
- IPC分类号： H01L21/683
摘要：
The present disclosure relates to the field of fabricating microelectronic devices, wherein a microelectronic device substrate, such as a microelectronic wafer, may be diced into individual microelectronic dice using an adhesive tape which reduces the potential of electrostatic discharge damage by the incorporation or anti-static, and may be compatible with a laser scribing process by the incorporation of ultraviolet light absorbing agents into an adhesive layer of the adhesive tape.
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