发明申请
US20140144420A1 METHOD FOR RESUMING A WIRE SAWING PROCESS OF A WORKPIECE AFTER AN UNPLANNED INTERRUPTION 有权
不间断中断后工作线路切割过程的方法

  • 专利标题: METHOD FOR RESUMING A WIRE SAWING PROCESS OF A WORKPIECE AFTER AN UNPLANNED INTERRUPTION
  • 专利标题(中): 不间断中断后工作线路切割过程的方法
  • 申请号: US14087163
    申请日: 2013-11-22
  • 公开(公告)号: US20140144420A1
    公开(公告)日: 2014-05-29
  • 发明人: Peter Wiesner
  • 申请人: Siltronic AG
  • 申请人地址: DE Munich
  • 专利权人: Siltronic AG
  • 当前专利权人: Siltronic AG
  • 当前专利权人地址: DE Munich
  • 优先权: DE102012221904.8 20121129
  • 主分类号: B28D5/04
  • IPC分类号: B28D5/04
METHOD FOR RESUMING A WIRE SAWING PROCESS OF A WORKPIECE AFTER AN UNPLANNED INTERRUPTION
摘要:
A method resumes an interrupted process for sawing a workpiece into wafers using a wire saw that includes advancing a wire web into existing sawing kerfs of the workpiece with a forward movement of the sawing wire with a first speed in the presence of a liquid sawing medium until the wire web or workpiece has reached a position corresponding to the interruption of the wire sawing process. The sawing wire is moved in defined time intervals by a forward movement of a particular length with a second speed and a backward movement of another length with a third speed, where the backward length is less than the forward length and the forward and backward movement correspond to a cycle. The wire length that is unwound during the forward movements is increased until the length during the forward movement corresponds to the length of the forward movement before the interruption.
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