发明申请
US20140147947A1 Thin Film Transistor and Method for Manufacturing a Display Panel
审中-公开
薄膜晶体管及制造显示面板的方法
- 专利标题: Thin Film Transistor and Method for Manufacturing a Display Panel
- 专利标题(中): 薄膜晶体管及制造显示面板的方法
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申请号: US14168971申请日: 2014-01-30
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公开(公告)号: US20140147947A1公开(公告)日: 2014-05-29
- 发明人: Yu-Gwang JEONG , Young-Wook LEE , Sang-Gab KIM , Woo-Geun LEE , Min-Seok OH , Jang-Soo KIM , Kap-Soo YOON , Shin-Il CHOI , Hong-Kee CHIN , Seung-Ha CHOI , Seung-Hwan SHIM , Sung-Hoon YANG , Ki-Hun JEONG
- 申请人: SAMSUNG DISPLAY CO., LTD.
- 申请人地址: KR YONGIN-CITY
- 专利权人: SAMSUNG DISPLAY CO., LTD.
- 当前专利权人: SAMSUNG DISPLAY CO., LTD.
- 当前专利权人地址: KR YONGIN-CITY
- 优先权: KR10-2007-0128464 20071211
- 主分类号: H01L27/12
- IPC分类号: H01L27/12
摘要:
Embodiments of the present invention relate to a thin film transistor and a manufacturing method of a display panel, and include forming a gate line including a gate electrode on a substrate, forming a gate insulating layer on the gate electrode, forming an intrinsic semiconductor on the gate insulating layer, forming an extrinsic semiconductor on the intrinsic semiconductor, forming a data line including a source electrode and a drain electrode on the extrinsic semiconductor, and plasma-treating a portion of the extrinsic semiconductor between the source electrode and the drain electrode to form a protection member and ohmic contacts on respective sides of the protection member. Accordingly, the process for etching the extrinsic semiconductor and forming an inorganic insulating layer for protecting the intrinsic semiconductor may be omitted such that the manufacturing process of the display panel may be simplified, manufacturing cost may be reduced, and productivity may be improved.
公开/授权文献
- US08975145B2 Method for manufacturing a display panel 公开/授权日:2015-03-10
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