发明申请
- 专利标题: METHOD OF MANUFACTURING CHIP-STACKED SEMICONDUCTOR PACKAGE
- 专利标题(中): 制造芯片堆叠半导体封装的方法
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申请号: US14093853申请日: 2013-12-02
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公开(公告)号: US20140154839A1公开(公告)日: 2014-06-05
- 发明人: Jung-seok Ahn , Dong-hyeon Jang , Ho-geon Song , Sung-jun Im , Chang-seong Jeon , Teak-hoon Lee , Sang-sick Park
- 申请人: Jung-seok Ahn , Dong-hyeon Jang , Ho-geon Song , Sung-jun Im , Chang-seong Jeon , Teak-hoon Lee , Sang-sick Park
- 优先权: KR10-2011-0041543 20110502
- 主分类号: H01L25/00
- IPC分类号: H01L25/00
摘要:
A method of manufacturing a chip-stacked semiconductor package, the method including preparing a base wafer including a plurality of first chips each having a through-silicon via (TSV); bonding the base wafer including the plurality of first chips to a supporting carrier; preparing a plurality of second chips; forming stacked chips by bonding the plurality of second chips to the plurality of first chips; sealing the stacked chips with a sealing portion; and separating the stacked chips from each other.
公开/授权文献
- US09136260B2 Method of manufacturing chip-stacked semiconductor package 公开/授权日:2015-09-15
信息查询
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