Invention Application
US20140155250A1 SUBSTRATE FOR CARBON NANOTUBE GROWTH AND METHOD FOR MANUFACTURING THE SAME 有权
碳纳米管生长用基材及其制造方法

SUBSTRATE FOR CARBON NANOTUBE GROWTH AND METHOD FOR MANUFACTURING THE SAME
Abstract:
Provided is a substrate for carbon nanotube growth in which no metal particles as a catalyst aggregates and a method for manufacturing the substrate. A substrate for carbon nanotube growth 1 includes a base plate 2, a noble metal alloy catalyst 3 having an alloy of a noble metal and a transition metal, and a form-defining material layer 4 which allows the noble metal alloy catalyst 3 to be dispersed and arranged. A method for manufacturing a substrate for carbon nanotube growth 1 includes a step of sputtering a noble metal alloy on a base plate 2, a step of sputtering a form-defining material on the base plate 2, and a step of further sputtering the noble metal alloy on the form-defining material.
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