SUBSTRATE FOR CARBON NANOTUBE GROWTH AND METHOD FOR MANUFACTURING THE SAME
    1.
    发明申请
    SUBSTRATE FOR CARBON NANOTUBE GROWTH AND METHOD FOR MANUFACTURING THE SAME 有权
    碳纳米管生长用基材及其制造方法

    公开(公告)号:US20140155250A1

    公开(公告)日:2014-06-05

    申请号:US14095426

    申请日:2013-12-03

    IPC分类号: B01J23/89

    摘要: Provided is a substrate for carbon nanotube growth in which no metal particles as a catalyst aggregates and a method for manufacturing the substrate. A substrate for carbon nanotube growth 1 includes a base plate 2, a noble metal alloy catalyst 3 having an alloy of a noble metal and a transition metal, and a form-defining material layer 4 which allows the noble metal alloy catalyst 3 to be dispersed and arranged. A method for manufacturing a substrate for carbon nanotube growth 1 includes a step of sputtering a noble metal alloy on a base plate 2, a step of sputtering a form-defining material on the base plate 2, and a step of further sputtering the noble metal alloy on the form-defining material.

    摘要翻译: 本发明提供一种碳纳米管生长用基材,其中不含作为催化剂的金属颗粒聚集体及其制造方法。 用于碳纳米管生长的衬底1包括基板2,具有贵金属和过渡金属的合金的贵金属合金催化剂3和允许贵金属合金催化剂3分散的形式限定材料层4 并安排。 制造碳纳米管生长用基板1的方法包括在基板2上溅射贵金属合金的步骤,在基板2上溅射形成界定材料的步骤,以及进一步溅射贵金属 合金在形式定义材料上。

    Substrate for carbon nanotube growth and method for manufacturing the same
    2.
    发明授权
    Substrate for carbon nanotube growth and method for manufacturing the same 有权
    碳纳米管生长用基板及其制造方法

    公开(公告)号:US09056312B2

    公开(公告)日:2015-06-16

    申请号:US14095426

    申请日:2013-12-03

    摘要: Provided is a substrate for carbon nanotube growth in which no metal particles as a catalyst aggregates and a method for manufacturing the substrate. A substrate for carbon nanotube growth 1 includes a base plate 2, a noble metal alloy catalyst 3 having an alloy of a noble metal and a transition metal, and a form-defining material layer 4 which allows the noble metal alloy catalyst 3 to be dispersed and arranged. A method for manufacturing a substrate for carbon nanotube growth 1 includes a step of sputtering a noble metal alloy on a base plate 2, a step of sputtering a form-defining material on the base plate 2, and a step of further sputtering the noble metal alloy on the form-defining material.

    摘要翻译: 本发明提供一种碳纳米管生长用基材,其中不含作为催化剂的金属颗粒聚集体及其制造方法。 用于碳纳米管生长的衬底1包括基板2,具有贵金属和过渡金属的合金的贵金属合金催化剂3和允许贵金属合金催化剂3分散的形式限定材料层4 并安排。 制造碳纳米管生长用基板1的方法包括在基板2上溅射贵金属合金的步骤,在基板2上溅射形成界定材料的步骤,以及进一步溅射贵金属 合金在形式定义材料上。

    SUBSTRATE FOR CARBON NANOTUBE GROWTH AND METHOD FOR MANUFACTURING THE SAME
    4.
    发明申请
    SUBSTRATE FOR CARBON NANOTUBE GROWTH AND METHOD FOR MANUFACTURING THE SAME 有权
    碳纳米管生长用基材及其制造方法

    公开(公告)号:US20140155251A1

    公开(公告)日:2014-06-05

    申请号:US14095447

    申请日:2013-12-03

    IPC分类号: B01J23/78

    摘要: Provided is a substrate for carbon nanotube growth in which no metal particles as a catalyst aggregates and a method for manufacturing the substrate. A substrate for carbon nanotube growth 1 includes a base plate 2, a catalyst 3, a form-defining material layer 4 which allows the catalyst 3 to be dispersed and arranged, and a covering layer 5 which has a metal oxide to cover the catalyst. A method for manufacturing a substrate for carbon nanotube growth 1 includes a step of sputtering on a base plate 2 a metal which forms a catalyst 3 and oxidizing the surface of the metal, a step of sputtering a form-defining material on the base plate 2, and a step of further sputtering on the form-defining material a metal which forms a catalyst 3 and oxidizing the surface of the metal.

    摘要翻译: 本发明提供一种碳纳米管生长用基材,其中不含作为催化剂的金属颗粒聚集体及其制造方法。 用于碳纳米管生长的衬底1包括底板2,催化剂3,允许催化剂3分散和排列的形式限定材料层4和具有覆盖催化剂的金属氧化物的覆盖层5。 制造碳纳米管生长用基板1的方法包括在基板2上溅射形成催化剂3的金属,氧化金属表面的工序,在基板2上溅射形成限定材料的工序 以及在形成限定材料上进一步溅射形成催化剂3并氧化金属表面的金属的步骤。

    Substrate for carbon nanotube growth and method for manufacturing the same
    5.
    发明授权
    Substrate for carbon nanotube growth and method for manufacturing the same 有权
    碳纳米管生长用基板及其制造方法

    公开(公告)号:US09289753B2

    公开(公告)日:2016-03-22

    申请号:US14095447

    申请日:2013-12-03

    摘要: Provided is a substrate for carbon nanotube growth in which no metal particles as a catalyst aggregates and a method for manufacturing the substrate. A substrate for carbon nanotube growth 1 includes a base plate 2, a catalyst 3, a form-defining material layer 4 which allows the catalyst 3 to be dispersed and arranged, and a covering layer 5 which has a metal oxide to cover the catalyst. A method for manufacturing a substrate for carbon nanotube growth 1 includes a step of sputtering on a base plate 2 a metal which forms a catalyst 3 and oxidizing the surface of the metal, a step of sputtering a form-defining material on the base plate 2, and a step of further sputtering on the form-defining material a metal which forms a catalyst 3 and oxidizing the surface of the metal.

    摘要翻译: 本发明提供一种碳纳米管生长用基材,其中不含作为催化剂的金属颗粒聚集体及其制造方法。 用于碳纳米管生长的衬底1包括底板2,催化剂3,允许催化剂3分散和排列的形式限定材料层4和具有覆盖催化剂的金属氧化物的覆盖层5。 制造碳纳米管生长用基板1的方法包括在基板2上溅射形成催化剂3的金属,氧化金属表面的工序,在基板2上溅射形成限定材料的工序 以及在形成限定材料上进一步溅射形成催化剂3并氧化金属表面的金属的步骤。