发明申请
- 专利标题： Combinatorial Processing Using a Remote Plasma Source
- 专利标题（中）： 使用远程等离子体源的组合处理
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申请号： US13717478申请日： 2012-12-17
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公开(公告)号： US20140166616A1公开(公告)日： 2014-06-19
- 发明人: Sunil Shanker , Tony P. Chiang , Chi-I Lang , Sandip Niyogi
- 申请人： INTERMOLECULAR, INC.
- 申请人地址： US CA San Jose
- 专利权人： INTERMOLECULAR, INC.
- 当前专利权人： INTERMOLECULAR, INC.
- 当前专利权人地址： US CA San Jose
- 主分类号： C23C16/50
- IPC分类号： C23C16/50 ; B44C1/22
摘要：
Methods and apparatus for processing using a remote plasma source are disclosed. The apparatus includes an outer chamber, a remote plasma source, and a showerhead. Inert gas ports within the showerhead assembly can be used to alter the concentration and energy of reactive radical or reactive neutral species generated by the remote plasma source in different regions of the showerhead. This allows the showerhead to be used to apply a surface treatment to different regions of the surface of a substrate. Varying parameters such as the remote plasma parameters, the inert gas flows, pressure, and the like allow different regions of the substrate to be treated in a combinatorial manner.
公开/授权文献
- US08821987B2 Combinatorial processing using a remote plasma source 公开/授权日：2014-09-02
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