发明申请
- 专利标题： METHOD FOR SUPPLYING SEQUENTIAL POWER IMPULSES
- 专利标题（中）： 供应顺序功率的方法
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申请号： US14112757申请日： 2012-04-04
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公开(公告)号： US20140190819A1公开(公告)日： 2014-07-10
- 发明人: Siegfried Krassnitzer , Daniel Lendi , Markus Lechthaler , Kurt Ruhm
- 申请人： Siegfried Krassnitzer , Daniel Lendi , Markus Lechthaler , Kurt Ruhm
- 申请人地址： CH Trubbach
- 专利权人： OERLIKON TRADING AG, TRUBBACH
- 当前专利权人： OERLIKON TRADING AG, TRUBBACH
- 当前专利权人地址： CH Trubbach
- 优先权： DE102011018363.9 20110420; DE102011117177.4 20111028
- 国际申请： PCT/EP2012/001484 WO 20120404
- 主分类号： C23C14/34
- IPC分类号： C23C14/34
摘要：
The invention relates to a method for supplying power impulses for PVD sputtering cathodes subdivided into partial cathodes. In said method, the power impulse intervals acting on the partial cathodes are selected in such a way as to overlap, thereby dispensing with the need to interrupt the drawing of power supplied by the generator.
公开/授权文献
- US09267200B2 Method for supplying sequential power impulses 公开/授权日：2016-02-23
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